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Volumn 195, Issue , 2013, Pages 21-26

Polymer shrinkage of hot embossed microstructures for higher aspect ratio and smaller size

Author keywords

Hot embossing; MEMS; Microstructure; Shrinkable polymer

Indexed keywords

DIFFERENT LAYERS; HOT EMBOSSING PROCESS; HOT-EMBOSSING; LATERAL DIRECTIONS; LOW TEMPERATURES; POLISHING PROCESSS; POLYMER FABRICATIONS; VERTICAL DIRECTION;

EID: 84875408870     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.02.015     Document Type: Article
Times cited : (14)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.