UV-LIGA: A promising and low-cost variant for microsystem technology

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1999, Pages 380-383

  Qu, Wenmin ^a   Wenzel, Christian ^a   Jahn, Andreas ^a   Zeidler, Dieter ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; PHOTORESISTS; ULTRAVIOLET RADIATION;

MICROSYSTEM TECHNOLOGY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032642561     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)