Fabrication of microstructures using shrinkable polystyrene films

Sensors and Actuators, A: Physical

Volumn 65, Issue 2-3, 1998, Pages 209-217

  Zhao, Xiao Mei ^a   Xia, Younan ^a   Schueller, Olivier J A ^a   Qin, Dong ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

High aspect ratio microstructures; Microtransfer molding; Reactive ion etching; Replica molding; Shrinkable polymer; Size reduction

Indexed keywords

ASPECT RATIO; HEAT TREATMENT; MICROSTRUCTURE; PLASTIC FILMS; POLYSTYRENES; SHRINKAGE;

REPLICA MOLDING; SHRINKABLE POLYSTYRENE FILMS;

REACTIVE ION ETCHING;

EID: 0032520299     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01692-0     Document Type: Article

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