Fabrication of optical waveguides in thermosetting polymers using hot embossing

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 945-949

  Choi, Choon Gi ^a  

^a Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; CURING; ELECTRON BEAMS; GLASS TRANSITION; MICROSTRUCTURE; OPTICAL WAVEGUIDES; PLASTIC FILMS; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; THERMODYNAMIC STABILITY; ULTRAVIOLET RADIATION;

DEEP REACTIVE ION ETCHING (DRIE); HOT EMBOSSING; SINGLE-MODE CHANNEL WAVEGUIDES;

THERMOSETS;

EID: 3142696824     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/7/015     Document Type: Article

References (12)

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