Pattern size reduction of nanoprint-fabricated structures on heat-shrinkable film

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 9 B, 2007, Pages 6395-6397

  Yokoo, Atsushi ^a,b   Wada, Kazumi ^b   Kimerling, Lionel C ^b  

^a NTT Basic Research Laboratories   (Japan)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Direct nanoprinting; Nanoimprint lithography; Nanostructure; Polymer film

Indexed keywords

FABRICATION; HEAT TREATMENT; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURES; PATTERN RECOGNITION;

DIRECT NANOPRINTING; HEAT-SHRINKABLE FILM; NANOIMPRINT TECHNOLOGY;

POLYMER FILMS;

HEAT TREATMENT; LITHOGRAPHY; SHRINKAGE;

EID: 34648819049     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6395     Document Type: Article

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