Fabrication of polymeric microstructures with high aspect ratios using shrinkable polystyrene films

Advanced Materials

Volumn 9, Issue 3, 1997, Pages 251-254

  Zhao, Xiao Mei ^a   Xia, Younan ^a   Qin, Dong ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; HEATING; MICROSTRUCTURE; POLYSTYRENES; REACTIVE ION ETCHING; SHRINKAGE; SURFACE STRUCTURE; THERMAL EFFECTS;

POLYMERIC MICROSTRUCTURES;

PLASTIC FILMS;

EID: 0031071673     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19970090316     Document Type: Article

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