Radiation-enhanced self- and boron diffusion in germanium

Physical Review B - Condensed Matter and Materials Physics

Volumn 87, Issue 11, 2013, Pages

  Schneider, S ^a   Bracht, H ^a   Klug, J N ^b   Hansen, J Lundsgaard ^c   Larsen, A Nylandsted ^c   Bougeard, D ^d   Haller, E E ^e  

^a UNIVERSITY OF MÜNSTER   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c AARHUS UNIVERSITY   (Denmark)

^d UNIVERSITY OF REGENSBURG   (Germany)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84875345787     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.87.115202     Document Type: Article

References (52)

1. Germanium-Based Technologies-From Materials to Devices, edited by C. Claeys and E. Simoen (Elsevier, Amsterdam, 2007).
2. D. P. Brunco, J. Electrochem. Soc. JESOAN 0013-4651 10.1149/1.2919115 155, H552 (2008). (Pubitemid 351752915)
3. E. Simoen, J. Mitard, G. Hellings, G. Eneman, B. De Jaeger, L. Witters, B. Vincent, R. Loo, A. Delabie, S. Sioncke, M. Caymax, and C. Claeys, Mater. Sci. Semicond. Process. 1369-8001 10.1016/j.mssp.2012.04.017 15, 588 (2012).
4. S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 2001).
5. H. Bracht, H. H. Silvestri, I. D. Sharp, and E. E. Haller, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.75.035211 75, 035211 (2007).
6. M. Werner, H. Mehrer, and H. D. Hochheimer, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.32.3930 32, 3930 (1985).
7. H. Bracht and S. Brotzmann, Mater. Sci. Semicond. Process. 1369-8001 10.1016/j.mssp.2006.08.041 9, 471 (2006). (Pubitemid 44856342)
8. S. Brotzmann, H. Bracht, J. L. Hansen, A. N. Larsen, E. Simoen, E. E. Haller, J. S. Christensen, and P. Werner, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.77.235207 77, 235207 (2008).
9. M. Naganawa, Y. Shimizu, M. Uematsu, K. M. Itoh, K. Sawano, Y. Shiraki, and E. E. Haller, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3025892 93, 191905 (2008).
10. S. Brotzmann and H. Bracht, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2837103 103, 033508 (2008). (Pubitemid 351263917)
11. P. Dorner, W. Gust, A. Lodding, H. Odelius, B. Predel, and U. Roll, Acta Metall. AMETAR 0001-6160 10.1016/0001-6160(82)90200-0 30, 941 (1982). (Pubitemid 12513515)
12. P. Dorner, W. Gust, A. Lodding, H. Odelius, B. Predel, and U. Roll, Z. Metallkde. 73, 325 (1982).
13. U. Södervall, H. Odelius, A. Lodding, U. Roll, B. Predel, W. Gust, and P. Dorner, Philos. Mag. A PMAADG 0141-8610 10.1080/01418618608243611 54, 539 (1986).
14. I. Riihimäki, A. Virtanen, S. Rinta-Anttila, P. Pusa, J. Räisänen (ISOLDE Collaboration), Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2778540 91, 091922 (2007). (Pubitemid 47352284)
15. R. Kube, H. Bracht, A. Chroneos, M. Posselt, and B. Schmidt, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.3226860 106, 063534 (2009).
16. E. Hüger, U. Tietze, D. Lott, H. Bracht, D. Bougeard, E. E. Haller, and H. Schmidt, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3002294 93, 162104 (2008).
17. A. Fazzio, A. Janotti, A. J. R. da Silva, and R. Mota, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.61.R2401 61, R2401 (2000).
18. A. J. R. da Silva, A. Janotti, A. Fazzio, R. J. Baierle, and R. Mota, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.62.9903 62, 9903 (2000). (Pubitemid 32335516)
19. M. D. Moreira, R. H. Miwa, and P. Venezuela, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.70.115215 70, 115215 (2004).
20. J. Vanhellemont, P. Śpiewak, and K. Sueoka, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2429718 101, 036103 (2007). (Pubitemid 46280951)
21. J. Vanhellemont and E. Simoen, J. Electrochem. Soc. JESOAN 0013-4651 10.1149/1.2732221 154, H572 (2007). (Pubitemid 46876602)
22. P. Śpiewak, J. Vanhellemont, K. Sueoka, K. J. Kurzydłowski, and I. Romandic, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2907730 103, 086103 (2008). (Pubitemid 351623674)
23. P. Śpiewak, J. Vanhellemont, K. Sueokad, K. J. Kurzydłowskia, and I. Romandic, Mater. Sci. Semicond. Process. 1369-8001 10.1016/j.mssp.2008.09.002 11, 328 (2008).
24. J. Vanhellemont, J. Lauwaert, A. Witecka, P. Śpiewak, I. Romandic, and P. Clauws, Phys. B (Amsterdam) PHYBE3 0921-4526 10.1016/j.physb.2009.08.121 404, 4529 (2009).
25. H. Bracht, S. Schneider, J. N. Klug, C. Y. Liao, J. L. Hansen, E. E. Haller, A. N. Larsen, D. Bougeard, M. Posselt, and C. Wündisch, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.103.255501 103, 255501 (2009).
26. E. Bruno, S. Mirabella, G. Scapellato, G. Impellizzeri, A. Terrasi, F. Priolo, E. Napolitani, D. De Salvador, M. Mastromatteo, and A. Carnera, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.80.033204 80, 033204 (2009).
27. E. Napolitani, G. Bisognin, E. Bruno, M. Mastromatteo, G. G. Scapellato, S. Boninelli, D. De Salvador, S. Mirabella, C. Spinella, A. Carnera, and F. Priolo, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3429084 96, 201906 (2010).
28. H. Bracht, S. Schneider, and R. Kube, Microelectron. Eng. MIENEF 0167-9317 10.1016/j.mee.2010.10.013 88, 452 (2011).
29. G. G. Scapellato, E. Bruno, A. J. Smith, E. Napolitani, D. De Salvador, S. Mirabella, M. Mastromatteo, A. Carnera, R. Gwilliam, and F. Priolo, Nucl. Instrum. Methods Phys. Res., Sect. B NIMBEU 0168-583X 10.1016/j.nimb.2011.08.041 282, 8 (2012).
30. A. Carvalho, R. Jones, C. Janke, J. P. Goss, P. R. Briddon, J. Coutinho, and S. Öberg, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.99. 175502 99, 175502 (2007). (Pubitemid 350015162)
31. P. Delugas and V. Fiorentini, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.69.085203 69, 085203 (2004).
32. C. Janke, R. Jones, S. Öberg, and P. R. Briddon, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.77.075208 77, 075208 (2008).
33. J. P. Biersack and L. G. Haggmark, Nucl. Instrum. Methods NUIMAL 0029-554X 10.1016/0029-554X(80)90440-1 174, 257 (1980).
34. H. Bracht, J. F. Pedersen, N. Zangenberg, A. N. Larsen, E. E. Haller, G. Lulli, and M. Posselt, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.91. 245502 91, 245502 (2003).
35. A. C. Damask and G. J. Dienes, Point Defects in Metals (Gordon and Breach, New York, 1963).
36. S. Schneider and H. Bracht, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.3534791 98, 014101 (2011).
37. M. Posselt, F. Gao, and D. Zwicker, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.71.245202 71, 245202 (2005). (Pubitemid 41709340)
38. M. Posselt, F. Gao, and H. Bracht, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.78.035208 78, 035208 (2008).
39. S. Uppal, A. F. W. Willoughby, J. M. Bonar, N. E. B. Cowern, T. Grasby, R. J. H. Morris, and M. G. Dowsett, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1766090 96, 1376 (2004).
40. A. Chroneos, B. P. Uberuaga, and R. W. Grimes, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2798875 102, 083707 (2007). (Pubitemid 350025658)
41. A. Chroneos, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.3361115 107, 076102 (2010).
42. A. Mesli, L. Dobaczewski, K. B. Nielsen, V. Kolkovsky, M. C. Petersen, and A. N. Larsen, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.78.165202 78, 165202 (2008).
43. H. Haesslein, R. Sielemann, and C. Zistl, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.80.2626 80, 2626 (1998).
44. H. Bracht, Phys. Rev. B PRBMDO 1098-0121 10.1103/PhysRevB.75.035210 75, 035210 (2007).
45. The maximum peak concentration decreases with increasing temperature and remains within an accuracy of 20 % constant at a given temperature. This indicates that the B clusters tend to dissolve with increasing temperature but still remain fairly stable for given temperature and irradiation conditions. The uncertainty due to B clusters does not significantly alter the main results of our simulations since their contribution to the total B profile stays approximately constant and can be fairly well extracted from the B profile shown in Fig..
46. Bs- ≈ 0.
47. A. Seeger, H. Föll, and W. Frank, Radiation Effects in Semiconductors 1976, IOP Conf. Proc. No. 31 (Institute of Physics, London, 1977), p. 12.
48. S. Mirabella, D. De Salvador, E. Napolitani, E. Bruno, and F. Priolo, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.4763353 113, 031101 (2013).
49. A. Dimoulas and P. Tsipas, Microelectron. Eng. MIENEF 0167-9317 10.1016/j.mee.2009.03.055 86, 1577 (2009).
50. W. Brattain and J. Bardeen, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.74.231 74, 231 (1948).
51. E. N. Clarke, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.95.284 95, 284 (1954).
52. E. Kamiyama, K. Sueoka, and J. Vanhellemont, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.4703911 111, 083507 (2012).