Role of self-interstitials on B diffusion in Ge

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 282, Issue , 2012, Pages 8-11

  Scapellato, G G ^a   Bruno, E ^a   Smith, A J ^c   Napolitani, E ^b   De Salvador, D ^b   Mirabella, S ^a   Mastromatteo, M ^b   Carnera, A ^b   Gwilliam, R ^c   Priolo, F ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Boron; Germanium; Interstitials; Proton irradiation; Radiation enhanced diffusion

Indexed keywords

B DIFFUSION; CRYSTALLINE GE; DISSOCIATION PROCESS; FORMATION RATES; HIGH-T; INTERSTITIALS; MICROSCOPIC MECHANISMS; NEGATIVE ACTIVATION ENERGY; NONEQUILIBRIUM CONDITIONS; RADIATION ENHANCED DIFFUSION; TEMPERATURE RANGE; THERMAL CONDITION; THERMAL GENERATION;

ACTIVATION ENERGY; BORON; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DISSOCIATION; ENERGY BARRIERS; GERMANIUM; IRRADIATION; POINT DEFECTS; PROTON IRRADIATION;

DIFFUSION IN SOLIDS;

EID: 84861618475     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.08.041     Document Type: Conference Paper

References (25)

1. C. Claeys, and E. Simoen Germanium-Based Technologies - From Materials to Devices 2007 Elsevier Amsterdam references therein
2. J. Vanhellemont, P. Spiewak, and K. Sueoka J. Appl. Phys. 101 2007 036103
3. A. Carvalho Phys Rev. Lett. 99 2007 175502
4. S. Brotzmann Phys. Rev. B 77 2008 235207
5. H. Bracht MRS Bulletin 25 2000 22
6. U. Gösele Mater. Res. Soc Symp. Proc. 610 2000
7. S. Uppal J. Appl. Phys. 96 2004 1376
8. A. Chroneos, P.B. Uberuaga, and R.W. Grimes J. Appl. Phys. 102 2007 083707
9. A. Chroneos, C.A. Londos, and H. Bracht Mater. Sci. Eng. B 176 2011 453
10. E. Bruno Phys. Rev. B 80 2009 033204
11. H. Bracht Phys. Rev. Lett. 103 2009 255501
12. E. Napolitani Appl. Phys. Lett. 96 2010 201906
13. D. De Salvador Phys. Rev. Lett. 97 2006 255902
14. S. Mirabella Phys. Rev. B 65 2002 45209
15. F. Ziegler, J.P. Biresack, and U. Littmark The Stopping and the Range of Ions in Solids 1985 Pergamon New York
16. N.E.B. Cowern Phys. Rev. Lett. 65 1990 2434
17. N.E.B. Cowern Phys. Rev. Lett. 67 1991 212
18. P. Lévêque J. Appl. Phys. 89 2001 5400
19. J. Vanhellemoint, and E. Simoen J. Electroch. Soc. 154 2007 7 H572
20. P. Śpiewak J. Cryst. Growth 303 2007 12
21. T. Soma, and A. Morita J. Phys. Soc. Jpn. 32 1972 357
22. T. Soma, M. Saeki, and A. Morita J. Phys. Soc. Jpn. 35 1973 146
23. M. Dionízio Mortira, R.H. Miwa, and P. Venezuela Phys. Rev. B 70 2004 115215
24. K. Sueoka, and J. Vanhellemont Mater. Sci. Semicond. Process. 9 2006 494
25. J. Lauwaert Phys. B 376 2006 257