Degenerate interface layers in epitaxial scandium-doped ZnO thin films

Journal of Physics D: Applied Physics

Volumn 46, Issue 6, 2013, Pages

  Lorenz, Michael ^a   Schmidt, Christian ^a   Benndorf, Gabriele ^a   Böntgen, Tammo ^a   Hochmuth, Holger ^a   Böttcher, Rolf ^a   Pöppl, Andreas ^a   Spemann, Daniel ^a   Grundmann, Marius ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3D-ELEMENTS; A-PLANE SAPPHIRE; COMPRESSIVE STRAIN; CONCENTRATION-DEPTH PROFILE; HETEROEPITAXIAL; HOMOEPITAXIAL; IN-PLANE LATTICES; INTERFACE LAYER; LOW RESISTIVITY; OXIDATION STATE; THERMAL ACTIVATION ENERGIES; XRD PEAKS; ZNO; ZNO FILMS; ZNO THIN FILM;

ACTIVATION ENERGY; EPITAXIAL GROWTH; HALL MOBILITY; MAGNETIC RESONANCE; METALLIC FILMS; MOS DEVICES; OPTICAL FILMS; PARAMAGNETISM; SAPPHIRE; SCANDIUM;

ZINC OXIDE;

EID: 84873815094     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/46/6/065311     Document Type: Article

References (40)

1. Jagadish C and Pearton S (ed) 2006 Zinc Oxide Bulk, Thin Films and Nanostructures (Amsterdam: Elsevier)
2. Ellmer K 2001 Resistivity of polycrystalline zinc oxide films: current status and physical limit J. Phys. D: Appl. Phys. 34 3097-108 (Pubitemid 33120726)
3. x Zn1-x O, ZnO, and ZnO :(Ga,Al) thin films on c-plane sapphire grown by pulsed laser deposition Solid-State Electron. 47 2205-9
4. Lorenz M 2008 Pulsed laser deposition of ZnO-based thin films Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells (Springer Series in Materials Science vol 104) ed K Ellmer (Berlin: Springer) chapter 7 pp 303-58
5. Jia J, Takasaki A, Oka N and Shigesato Y 2012 Experimental observation on the Fermi level shift in polycrystalline Al-doped ZnO films J. Appl. Phys. 112 013718
6. Look D C 2005 Electrical and optical properties of p-type ZnO Semicond. Sci. Technol. 20 S55-61
7. Brandt M et al 2008 High electron mobility of phosphorous-doped homoepitaxial ZnO thin films grown by pulsed-laser deposition J. Appl. Phys. 104 013708
8. Cao B Q, Lorenz M, Brandt M, von Wenckstern H, Lenzner J, Biehne G and Grundmann M 2008 p-type conducting ZnO : P microwires prepared by direct carbothermal growth Phys. Status Solidi 2 37-39 RRL (Pubitemid 351193816)
9. Pearton S J, Heo W H, Ivill M, Norton D P and Steiner T 2004 Dilute magnetic semiconducting oxides Semicond. Sci. Technol. 19 R59-74
10. Ungureanu M, Schmidt H, von Wenckstern H, Hochmuth H, Lorenz M, Grundmann M, Fecioru-Morariu M and Güntherodt G 2007 A comparison between ZnO films doped with 3d and 4f magnetic ions Thin Solid Films 515 8761-3 (Pubitemid 47449651)
11. Shannon R D 1976 Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides Acta Crystallogr. A 32 751-7
12. Corbett J D 1981 Extended metal-metal bonding in halides of the early transition metals Acc. Chem. Res. 14 239-46
13. McGuire J C and Kempter C P 1960 Preparation and properties of scandium dihydride J. Chem. Phys. 33 1584
14. Smith R E 1973 Diatomic hydride and deuteride spectra of the second row transition metals Proc. R. Soc. Lond. A 332 113-27
15. x O thin films and single crystals Phys. Rev. B 72 085214 (Pubitemid 41506471)
16. Minami T, Takashi Y and Toshihiro M 2000 Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering Thin Solid Films 366 63-8
17. Cunxing M, Zhanxia Z, Xiaomin M and Zhongquan M 2010 Studies on the properties of sputter-deposited Sc-doped ZnO thin film Phys. B: Condens. Matter 405 3787-90
18. Amézaga-Madrid P, Antúnez-Flores W, Ledezma-Sillas J E, Murillo-Ramírez J G, Solís-Canto O, Vega-Becerra O E, Martínez-Sánchez R and Miki-Yoshida M 2011 Synthesis, microstructural characterization and optical properties of undoped, V and Sc doped ZnO thin films J. Alloys Compounds 509 S490-5
19. Sharma R, Sehrawat K, Wakahara A and Mehra R M 2009 Epitaxial growth of Sc-doped ZnO films on Si by sol-gel route Appl. Surf. Sci. 255 5781-8
20. Sharma R, Sehrawat K and Mehra R M 2010 Epitaxial growth of highly transparent and conducting Sc-doped ZnO films on c-plane sapphire by sol-gel process without buffer Curr. Appl. Phys. 10 164-70
21. Lin J-C, Peng K-C, Yeh T-Y and Lee S-L 2009 On the structure and characterization of Al, Sc-co-doped ZnO-films varying with 0-2.37 wt% Sc contents Thin Solid Films 517 4715-9 see also Lin J-C, Peng K-C, Yeh T-Y and Lee S-L 2009 Corrosion behaviour of Al, Sc-co-doped ZnO thin films in 3.5% NaCl solution Thin Solid Films 517 4777-81
22. 2 O3 ) single crystals J. Appl. Phys. 85 6717
23. x Zn1-x O (x 0.29) thin films Appl. Phys. Lett. 82 2260-2
24. Look D C and Molnar R J 1997 Degenerate layer at GaN/sapphire interface: influence on Hall effect measurements Appl. Phys. Lett. 70 3377
25. Lorenz M, Brandt M, Wagner G, Hochmuth H, Zimmermann G, von Wenckstern H and Grundmann M 2009 MgZnO:P Homoepitaxy by pulsed laser deposition: pseudomorphic layer-by-layer growth and high electron mobility Proc. SPIE 7217 72170N
26. x Zn1-x O:P thin films grown by pulsed laser deposition on ZnO(0 0 0 -1) Phys. Status Solidi b 249 82-90
27. Chrisey D B and Hubler G H (ed) 1994 Pulsed Laser Deposition of Thin Films (New York: Wiley)
28. Christian Schmidt 2012 Strukturelle, optische und elektrische Untersuchung von Scandium-dotierten Zinkoxid-Dünnfilmen Diploma Thesis Universität Leipzig, Fakultät für Physik und Geowissenschaften
29. Grundmann M, Böntgen T and Lorenz M 2010 Occurrence of rotation domains in heteroepitaxy Phys. Rev. Lett. 105 146102
30. Ellmer K 2008 Electrical properties Transparent Conductive Zinc Oxide. Basics and Applications in Thin Film Solar Cells (Springer Series in Materials Science vol 104) vol 104 ed K Ellmer (Berlin: Springer) chapter 2
31. Baranov P G, Il'in I. V., Mokhov E N, Roenkov A D and Khramtsov V A 1997 Electron paramagnetic resonance of scandium in silicon carbide Phys. Solid State 39 44-8 (Pubitemid 127030245)
32. 2+ in ZnS Phys. Lett. A 42A 426-8
33. 1 ion in eightfold cubic coordination Phys. Rev. 162 262-73
34. 2+ Phys. Rev. Lett. 18 128-30
35. 2 crystals J. Mater. Res. 13 257-60 (Pubitemid 128592761)
36. 2 Phys. Rev. B 10 833-43
37. Khalid M, Setzer A, Ziese M, Esquinazi P, Spemann D, Pöppl A and Goering E 2010 Ubiquity of ferromagnetic signals in common diamagnetic oxide crystals Phys. Rev. B 81 214414
38. Schulz D
39. Look D C, Farlow G C, Pakpoom Reunchan, Sukit Limpijumnong, Zhang S B and Nordlund K 2005 Evidence for native-defect donors in n-type ZnO Phys. Rev. Lett. 95 225502 (Pubitemid 41776983)
40. Frenzel H, Lajn A, von Wenckstern H, Lorenz M, Schein F, Zhang Z and Grundmann M 2010 Recent progress on ZnO-based metal-semiconductor field-effect transistors and their application in transparent integrated circuits Adv. Mater. 22 5332