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Volumn 405, Issue 17, 2010, Pages 3787-3790

Studies on the properties of sputter-deposited Sc-doped ZnO thin film

Author keywords

Microstructure; Sputtering; Stress; SZO films; Transmittance

Indexed keywords

DEPOSITION PRESSURES; DOPED ZNO; OPTICAL AND ELECTRICAL PROPERTIES; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; SHORT WAVELENGTHS; SZO FILMS; WAVELENGTH RANGES; XRD SPECTRA;

EID: 77955551123     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2010.05.087     Document Type: Article
Times cited : (4)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.