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Volumn 405, Issue 17, 2010, Pages 3787-3790
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Studies on the properties of sputter-deposited Sc-doped ZnO thin film
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Author keywords
Microstructure; Sputtering; Stress; SZO films; Transmittance
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Indexed keywords
DEPOSITION PRESSURES;
DOPED ZNO;
OPTICAL AND ELECTRICAL PROPERTIES;
RF-MAGNETRON SPUTTERING;
ROOM TEMPERATURE;
SHORT WAVELENGTHS;
SZO FILMS;
WAVELENGTH RANGES;
XRD SPECTRA;
MAGNETRON SPUTTERING;
METALLIC FILMS;
MICROSTRUCTURE;
OPTICAL PROPERTIES;
SCANDIUM;
ZINC OXIDE;
ELECTRIC PROPERTIES;
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EID: 77955551123
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2010.05.087 Document Type: Article |
Times cited : (4)
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References (26)
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