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Volumn 58, Issue 2, 2013, Pages 113-129

Atomic layer deposition: Medical and biological applications

Author keywords

Ceramic structure; Metal surface treatment; Surface modification

Indexed keywords

ATOMIC LAYER DEPOSITION; BIOASSAY; BIOSENSORS; CERAMIC MATERIALS; DRUG DELIVERY; IMPLANTS (SURGICAL); SCAFFOLDS (BIOLOGY); TEMPERATURE; THIN FILMS;

EID: 84873126873     PISSN: 09506608     EISSN: 17432804     Source Type: Journal    
DOI: 10.1179/1743280412Y.0000000009     Document Type: Review
Times cited : (71)

References (79)
  • 1
    • 0000300191 scopus 로고
    • (ed. D. T. J. Huerle), Amsterdam, Elsevier.
    • T. Suntola: in 'Handbook of crystal growth', (ed. D. T. J. Huerle), Vol. 3, 601-663; 1994, Amsterdam, Elsevier.
    • (1994) Handbook of Crystal Growth , vol.3 , pp. 601-663
    • Suntola, T.1
  • 6
    • 84873191281 scopus 로고    scopus 로고
    • (ed. Y. Nishi and R. Doering), Boca Raton, FL, Taylor & Francis Group.
    • T. E. Seidel: in 'Handbook of semiconductor manufacturing technology', (ed. Y. Nishi and R. Doering), 14-1-14-36; 2007, Boca Raton, FL, Taylor & Francis Group.
    • (2007) Handbook of Semiconductor Manufacturing Technology , pp. 141-1436
    • Seidel, T.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.