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Volumn 13, Issue 3, 2010, Pages

Atomic layer deposited hafnium oxide gate dielectrics for charge-based biosensors

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS ELECTROLYTE; ATOMIC FORCE; ATOMIC LAYER DEPOSITED; CAPACITANCE RESPONSE; CAPACITANCE VOLTAGE; CHARGE MODULATION; DIELECTRIC CONSTANTS; DIELECTRIC LAYER; EFFICIENT SURFACE; FUNCTIONALIZATIONS; HIGHLY SENSITIVE; MOLECULAR SENSORS; SEMI-CONDUCTOR SURFACES; SEMICONDUCTOR CHANNELS;

EID: 74849090346     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3280224     Document Type: Article
Times cited : (28)

References (28)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.