Atomic layer deposited hafnium oxide gate dielectrics for charge-based biosensors

Electrochemical and Solid-State Letters

Volumn 13, Issue 3, 2010, Pages

  Chen, Yi Wei ^a   Liu, Maozi ^b   Kaneko, Tetsuya ^a   McIntyre, Paul C ^a  

^a Stanford University   (United States)

^b AGILENT LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS ELECTROLYTE; ATOMIC FORCE; ATOMIC LAYER DEPOSITED; CAPACITANCE RESPONSE; CAPACITANCE VOLTAGE; CHARGE MODULATION; DIELECTRIC CONSTANTS; DIELECTRIC LAYER; EFFICIENT SURFACE; FUNCTIONALIZATIONS; HIGHLY SENSITIVE; MOLECULAR SENSORS; SEMI-CONDUCTOR SURFACES; SEMICONDUCTOR CHANNELS;

ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; ATOMS; BIOSENSORS; CAPACITANCE; CHEMICAL SENSORS; DIELECTRIC MATERIALS; FIELD EFFECT TRANSISTORS; GATES (TRANSISTOR); HAFNIUM; HAFNIUM OXIDES; OXIDES; PHOTOELECTRON SPECTROSCOPY; SILICON COMPOUNDS;

GATE DIELECTRICS;

EID: 74849090346     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3280224     Document Type: Article

References (28)

1. F. Patolsky, B. P. Timko, G. F. Zheng, and C. M. Lieber, MRS Bull. 0883-7694, 32, 142 (2007).
2. Y. Cui, Q. Wei, H. Park, and C. M. Lieber, Science 0036-8075, 293, 1289 (2001). 10.1126/science.1062711 (Pubitemid 32777412)
3. E. Stern, J. F. Klemic, D. A. Routenberg, P. N. Wyrembak, D. B. Turner-Evans, A. D. Hamilton, D. A. LaVan, T. M. Fahmy, and M. A. Reed, Nature (London) 0028-0836, 445, 519 (2007). 10.1038/nature05498 (Pubitemid 46197629)
4. M. Curreli, R. Zhang, F. N. Ishikawa, H. -K. Chang, R. J. Cote, C. Zhou, and M. E. Thompson, IEEE Trans. Nanotechnol. 1536-125X, 7, 651 (2008). 10.1109/TNANO.2008.2006165
5. E. H. Snow, A. S. Grove, B. E. Deal, and C. T. Sah, J. Appl. Phys. 0021-8979, 36, 1664 (1965). 10.1063/1.1703105
6. M. Schulz and E. Klausmann, Appl. Phys. (Berlin) 0340-3793, 18, 169 (1979). 10.1007/BF00934412
7. http://www. intel. com/technology/45nm/index. html, last accessed Sep 2009.
8. T. Sugawara, R. Sreenivasan, and P. C. McIntyre, J. Vac. Sci. Technol. B 1071-1023, 24, 2442 (2006). 10.1116/1.2348887
9. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 0021-8979, 89, 5243 (2001). 10.1063/1.1361065
10. G. A. Parks, Chem. Rev. (Washington, D.C.) 0009-2665, 65, 177 (1965). 10.1021/cr60234a002
11. B. Prasad and R. Lal, Meas. Sci. Technol. 0957-0233, 10, 1097 (1999). 10.1088/0957-0233/10/11/321 (Pubitemid 30876197)
12. See supplementary material at http://dx.doi.org/10.1149/1.3280224 E-ESLEF6-13-033003 for additional information.
13. J. -J. Xu, X. -L. Luo, and H. -Y. Chen, Front. Biosci. 1093-4715, 10, 420 (2005). 10.2741/1538
14. G. Gould and A. Irene, J. Electrochem. Soc. 0013-4651, 134, 1031 (1987). 10.1149/1.2100563
15. H. Angermann, Th. Dittrich, and H. Flietner, Appl. Phys. A: Mater. Sci. Process. 0947-8396, 59, 193 (1994). 10.1007/BF00332216
16. J. Kendall, J. Am. Chem. Soc. 0002-7863, 38, 1480 (1916). 10.1021/ja02265a004
17. Thermo Scientific Pierce, Purified streptavidin and conjugates, http://www.piercenet.com/Products/browse.cfm?fldID=01030703, last accessed Sep 2009.
18. A. J. Bar and L. R. Faulkner, Electrochemical Methods: Fundamentals and Applications, 2nd ed., Wiley, New York (2001).
19. http://www.sigmaaldrich.com/life-science/cell-culture/learning-center/ media-expert/biotin.html, last accessed Sep 2009.
20. M. Kosmulski, Langmuir 0743-7463, 13, 6315 (1997). 10.1021/la970469g
21. G. T. Hermanson, Bioconjugate Techniques, 2nd ed., Academic Press, New York (2008).
22. M. Balsera, S. Stepaniants, S. Izrailev, Y. Oono, and K. Schulten, Biophys. J. 0006-3495, 73, 1281 (1997). 10.1016/S0006-3495(97)78161-X
23. J. Anzai, Y. Kobayashi, and H. Takeshita, Anal. Sci. 0910-6340, 13, 859 (1997). 10.2116/analsci.13.859
24. S. Carrara, L. Benini, V. Bhalla, C. Stagni, A. Ferretti, A. Cavallini, B. Ricc, and B. Samor, Biosens. Bioelectron. 0956-5663, 24, 3425 (2009). 10.1016/j.bios.2008.11.014
25. L. S. Jung, K. E. Nelson, C. T. Campbell, P. S. Stayton, S. S. Yee, V. Ṕrez-Luna, and G. P. López, Sens. Actuators B 0925-4005, 54, 137 (1999). 10.1016/S0925-4005(98)00332-3
26. H. Maupas, C. Saby, C. Martelet, N. Jaffrezic-Renault, A. P. Soldatkin, M. Charles, T. Delair, and B. Mandrand, J. Electroanal. Chem. 0022-0728, 406, 53 (1996). 10.1016/0022-0728(95)04443-4
27. M. Liu and J. Rosner, AFM SPM Scanning Probe Microscope Atomic Force Microscope Pico TREC, pp. 1-4, Agilent, Santa Clara, CA (2008).
28. Z. Liu and M. D. Amiridis, J. Phys. Chem. B 1089-5647, 109, 16866 (2005). 10.1021/jp0535240 (Pubitemid 41367428)