Wafer-scale process for fabricating arrays of nanopore devices

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 3, 2010, Pages

  Ahmadi, Amir G ^a   Peng, Zhengchun ^b   Hesketh, Peter J ^b   Nair, Sankar ^a  

^a Georgia Institute of Technology   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Atomic layer deposition; Electron beam lithography; Nanopore array; Nanopores; Nanotechnology; Solid state nanopore fabrication

Indexed keywords

ATOMIC LAYER DEPOSITION; ELECTRON BEAM LITHOGRAPHY; FABRICATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SILICON WAFERS; SURFACE CHEMISTRY;

ALUMINUM OXIDES; BIOSENSING; HIGH RESOLUTION; LARGE ARRAYS; NANOPORE ARRAY; NANOPORE SIZE; PORE DIMENSIONS; PORE GEOMETRY; PROCESSING STEPS; REPRODUCIBILITIES; SILICON NITRIDE FILM; SINGLE-MOLECULE ANALYSIS; SOLID STATE NANOPORE FABRICATION; SOLID-STATE NANOPORE; SURVIVAL RATE; WAFER-SCALE;

NANOPORES;

EID: 80455150383     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3486202     Document Type: Conference Paper

References (30)

1. M. E. Davis, "Ordered porous materials for emerging applications," Nature 417(6891), 813-821 (2002). (Pubitemid 34685481)
2. R. H. Baughman, A. A. Zakhidov, and W. A. de Heer, "Carbon nanotubes - the route toward applications," Science 297(5582), 787-792 (2002). (Pubitemid 34845917)
3. J. Goldberger, R. Fan, and P. D. Yang, "Inorganic nanotubes: a novel platform for nanofluidics," Acc. Chem. Res. 39(4), 239-248 (2006).
4. J. J. Kasianowicz, "Nanometer, scale pores: potential applications for analyte detection and DNA characterization," Dis. Markers 18(4), 185-191 (2002). (Pubitemid 36308195)
5. D. W. Deamer and M. Akeson, "Nanopores and nucleic acids: prospects for ultrarapid sequencing," Trends Biotechnol. 18(4), 147-151 (2000). (Pubitemid 30171332)
6. A. Marziali and M. Akeson, "New DNA sequencing methods," Annu. Rev. Biomed. Eng. 3, 195-223 (2001). (Pubitemid 32928038)
7. W. Vercoutere and M. Akeson, "Biosensors for DNA sequence detection," Curr. Opin. Chem. Biol. 6(6), 816-822 (2002). (Pubitemid 35449342)
8. J. Li, D. Stein, C. McMullan, D. Branton, M. J. Aziz, and J. A. Golovchenko, "Ion-beam sculpting at nanometre length scales," Nature 412(6843), 166-169 (2001). (Pubitemid 32674708)
9. J. L. Li, M. Gershow, D. Stein, E. Brandin, and J. A. Golovchenko, "DNA molecules and configurations in a solid-state nanopore microscope," Nature Mater. 2(9), 611-615 (2003).
10. J. Gierak, E. Bourhis, G. Faini, G. Patriarche, A. Madouri, R. Jede, L. Bruchaus, S. Bauerdick, B. Schiedt, A. L. Biance, and L. Auvray, "Exploration of the ultimate patterning potential achievable with focused ion beams," Ultramicroscopy 109(5), 457-462 (2009).
11. N. A. Patterson, D. P. Adams, V. C. Hodges, M. J. Vasile, J. R. Michael, and P. G. Kotula, "Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection," Nanotechnology 19(23), 235304 (2008).
12. S. Yue and C. Gu, "Nanopores fabricated by focused ion beam milling technology," in Proc. 7th IEEE Int. Conf. on Nanotechnology- IEEE-NANO 2007, pp. 628-631 (2007).
13. R. Kox, C. Chen, G. Maes, L. Lagae, and G. Borghs, "Shrinking solid-state nanopores using electron-beam-induced deposition," Nanotechnology 20(11), 115302 (2009).
14. A. Radenovic, E. Trepagnier, R. Csencsits, K. Downing, and J. Liphardt, "Fabrication of 10 nm diameter hydrocarbon nanopores," Appl. Phys. Lett. 93(18), 183101 (2008).
15. J. B. Heng, A. Aksimentiev, C. Ho, P. Marks, Y. V. Grinkova, S. Sliger, K. Schulten, and G. Timp, "Stretching DNA using an artificial nanopore," Biophys. J. 88(1), 659A-659A (2005).
16. J. B. Heng, A. Aksimentiev, C. Ho, V. Dimitrov, T. W. Sorsch, J. F. Miner, W. M. Mansfield, K. Schulten, and G. Timp, "Beyond the gene chip," Bell Labs Tech. J. 10(3), 5-22 (2005).
17. J. B. Heng, C. Ho, T. Kim, R. Timp, A. Aksimentiev, Y. V. Grinkova, S. Sligar, K. Schulten, and G. Timp, "Sizing DNA using a nanometerdiameter pore," Biophys. J. 87(4), 2905-2911 (2004).
18. U. F. Keyser, B. N. Koeleman, S. Van Dorp, D. Krapf, R. M. M. Smeets, S. G. Lemay, N. H. Dekker, and C. Dekker, "Direct force measurements on DNA in a solid-state nanopore," Nat. Phys. 2(7), 473-477 (2006). (Pubitemid 44022563)
19. D. Krapf, M. Y. Wu, R. M. M. Smeets, H. W. Zandbergen, C. Dekker, and S. G. Lemay, "Fabrication and characterization of nanoporebased electrodes with radii down to 2 nm," Nano Lett. 6(1), 105-109 (2006). (Pubitemid 43166110)
20. A. Mara and Z. Siwy, "An asymetric nanopore for biomolecular sensing," Biophys. J. 86(1), 603A-603A (2004).
21. H. Yan and B. Q. Xu, "Towards rapid DNA sequencing: detecting single-stranded DNA with a solid-state nanopore," Small 2(3), 310-312 (2006). (Pubitemid 43219126)
22. 2O, MRS, San Francisco (1997).
23. S. Jakschik, U. Schroeder, T. Hecht, D. Krueger, G. Dollinger, A. Bergmaier, C. Luhmann, and J. W. Bartha, "Physical characterization of thin ALD-Al2O3 films," Appl. Surf. Sci. 211(1-4), 352-359 (2003).
24. P. Chen, T. Mitsui, D. B. Farmer, J. Golovchenko, R. G. Gordon, and D. Branton, "Atomic layer deposition to fine-tune the surface properties and diameters of fabricated nanopores," Nano Lett. 4(7), 1333-1337 (2004). (Pubitemid 39092181)
25. J. Lund, R. Mehta, and B. A. Parviz, "Label-free direct electronic detection of biomolecules with amorphous silicon nanostructures," Nanomed. Nanotechnol. Biol. Med. 2(4), 230-238 (2006). (Pubitemid 44880857)
26. J. Tan, H.-F. Wang, and X.-P. Yan, "Discrimination of saccharides with a fluorescent molecular imprinting sensor array based on phenylboronic acid functionalized mesoporous silica," Anal. Chem. 81(13), 5273-5280 (2009).
27. I. Jogi, M. Pars, J. Aarik, A. Aidla, M. Laan, J. Sundqvist, L. Oberbeck, J. Heitmann, and K. Kaupo, "Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates," Thin Solid Films 516(15), 4855-4862 (2008). (Pubitemid 351601819)
28. L. Zhengwen, A. Rahtu, and R. G. Gordon, "Atomic layer deposition of ultrathin copper metal films from a liquid Copper(I( amidinate precursor," J. Electrochem. Soc. 153(11), 787-794 (2006).
29. H. Kim, "The application of atomic layer deposition for metallization of 65 nm and beyond," Surf. Coat. Technol. 200(10), 3104-3111 (2006). (Pubitemid 43169049)
30. G. A. T. Eyck, J. J. Senkevich, F. Tang, D. Liu, S. Pimanpang, T. Karaback, G. C. Wang, T. M. Lu, C. Jezewski, and W. A. Lanford, "Plasma-assisted atomic layer deposition of palladium," Chem. Vap. Deposition 11(1), 60-66 (2005). (Pubitemid 40259182)