SCOPUS 정보 검색 플랫폼

Volumn 52, Issue 1 PART2, 2013, Pages

Effect of direct current power to Ti-target on the composition, structure and characterization of the Ti (0-2.36 at. %), Al codoped ZnO sputtering thin films

(4) Lin, Jing Chie a Wu, Jing Nan a Tseng, Chun An a Peng, Kun Cheng b

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

b MING CHI UNIVERSITY OF TECHNOLOGY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE SURFACE ROUGHNESS; CO-DOPED ZNO; DC POWER; DEPTH PROFILE; DIRECT CURRENT; DIRECT CURRENT POWER; ELECTRICAL RESISTIVITY; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; FOUR-POINT PROBE; GLASS SUBSTRATES; MAGNETRON SPUTTERING SYSTEMS; PURE AL; PURE ZNO; RADIO FREQUENCY POWER; THICKNESS OF THE FILM; TRANSPARENT CONDUCTIVE; UV-VIS LIGHT; VISIBLE SPECTRA; WORKING PRESSURES; WURTZITE STRUCTURE;

ALUMINUM; ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; NITRIDES; PHOTOELECTRONS; SUBSTRATES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE; ZINC SULFIDE;

CONDUCTIVE FILMS;

EID: 84872862429 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.7567/JJAP.52.01AC06 Document Type: Article

Times cited : (4)

References (37)

1
- 77955509167
- J. H. Lee: Curr. Appl. Phys. 10 (2010) S515.
- (2010) Curr. Appl. Phys. , vol.10
- Lee, J.H.¹

2
- 0031210926
- Z. A. Ansari, R. N. Karekar, and R. C. Aiyer: Thin Solid Films 305 (1997) 330.
- (1997) Thin Solid Films , vol.305 , pp. 330
- Ansari, Z.A.¹ Karekar, R.N.² Aiyer, R.C.³

3
- 79953173549
- F. H. Wang and H. P. Chang: Curr. Appl. Phys. 11 (2011) S12.
- (2011) Curr. Appl. Phys. , vol.11
- Wang, F.H.¹ Chang, H.P.²

4
- 55049130509
- Y. S. Rim, S. M. Kim, and K.-H. Kim: Jpn. J. Appl. Phys. 47 (2008) 5022.
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 5022
- Rim, Y.S.¹ Kim, S.M.² Kim, K.-H.³

5
- 77953244233
- F. C. Krebs, T. Tromholt, and M. Jorgensen: Nanoscale 2 (2010) 873.
- (2010) Nanoscale , vol.2 , pp. 873
- Krebs, F.C.¹ Tromholt, T.² Jorgensen, M.³

6
- 34347230247
- U.S. Gov. Printing Office, Washington, D.C.
- D. Kempthorne and M. D. Myers: Mineral Commodity Summaries 2007 (U.S. Gov. Printing Office, Washington, D.C., 2007) p. 78.
- (2007) Mineral Commodity Summaries 2007 , pp. 78
- Kempthorne, D.¹ Myers, M.D.²

7
- 0038802449
- T. Homma, T. Ueno, K. Sekizawa, and A. Tanaka: J. Occup. Health 45 (2003) 137.
- (2003) J. Occup. Health , vol.45 , pp. 137
- Homma, T.¹ Ueno, T.² Sekizawa, K.³ Tanaka, A.⁴

8
- 77955517504
- K. U. Sim, S. W. Shin, and J. H. Kim: Curr. Appl. Phys. 10 (2010) S463.
- (2010) Curr. Appl. Phys. , vol.10
- Sim, K.U.¹ Shin, S.W.² Kim, J.H.³

9
- 61449233171
- T. Yamada, A. Miyake, and H. Makino: Thin Solid Films 517 (2009) 3134.
- (2009) Thin Solid Films , vol.517 , pp. 3134
- Yamada, T.¹ Miyake, A.² Makino, H.³

10
- 33748266458
- O. Nakagawara, Y. Kishimoto, and H. Seto: Appl. Phys. Lett. 89 (2006) 091904.
- (2006) Appl. Phys. Lett. , vol.89 , pp. 091904
- Nakagawara, O.¹ Kishimoto, Y.² Seto, H.³

11
- 63649143062
- P. K. Nayak, J. Yang, J. Kim, S. Chung, J. Jeong, C. Lee, and Y. Hong: J. Phys. D 42 (2009) 035102.
- (2009) J. Phys. D , vol.42 , pp. 035102
- Nayak, P.K.¹ Yang, J.² Kim, J.³ Chung, S.⁴ Jeong, J.⁵ Lee, C.⁶ Hong, Y.⁷

12
- 0037011185
- H. Kim, J. S. Horwitz, W. H. Kim, A. J. Makinen, and Z. H. Kafafi: Thin Solid Films 420-421 (2002) 539.
- (2002) Thin Solid Films , vol.420-421 , pp. 539
- Kim, H.¹ Horwitz, J.S.² Kim, W.H.³ Makinen, A.J.⁴ Kafafi, Z.H.⁵

13
- 76449105481
- T. Y. Park, Y. S. Choi, J. W. Kang, J. H. Jeong, S. J. Park, and D. M. Jeon: Appl. Phys. Lett. 96 (2010) 051124.
- (2010) Appl. Phys. Lett. , vol.96 , pp. 051124
- Park, T.Y.¹ Choi, Y.S.² Kang, J.W.³ Jeong, J.H.⁴ Park, S.J.⁵ Jeon, D.M.⁶

14
- 33750478695
- C. S. Hong, H. H. Park, and J. Moon: Thin Solid Films 515 (2006) 957.
- (2006) Thin Solid Films , vol.515 , pp. 957
- Hong, C.S.¹ Park, H.H.² Moon, J.³

15
- 1342310592
- S. J. Henley and M. N. R. Ashfold: Surf. Coatings Technol. 177-178 (2004) 271.
- (2004) Surf. Coatings Technol. , vol.177-178 , pp. 271
- Henley, S.J.¹ Ashfold, M.N.R.²

16
- 78649932230
- S. H. Paeng and M. W. Park: Surf. Coatings Technol. 205 (2010) S210.
- (2010) Surf. Coatings Technol. , vol.205
- Paeng, S.H.¹ Park, M.W.²

17
- 80255132081
- J. H. Kang and M. H. Lee: Curr. Appl. Phys. 11 (2011) S333.
- (2011) Curr. Appl. Phys. , vol.11
- Kang, J.H.¹ Lee, M.H.²

18
- 3142715276
- H. W. Lee, S. P. Lau, and Y. G. Wang: J. Cryst. Growth 268 (2004) 596.
- (2004) J. Cryst. Growth , vol.268 , pp. 596
- Lee, H.W.¹ Lau, S.P.² Wang, Y.G.³

19
- 84862798583
- accepted in press [DOI: 10.1016/j.apsusc.2012.02.061]
- C. A. Tseng, J. C. Lin, Y. F. Chang, S. D. Chyou, and K. C. Peng: Appl. Surf. Sci. (2012) accepted in press [DOI: 10.1016/j.apsusc.2012.02.061].
- (2012) Appl. Surf. Sci.
- Tseng, C.A.¹ Lin, J.C.² Chang, Y.F.³ Chyou, S.D.⁴ Peng, K.C.⁵

20
- 56949089717
- J. L. Chung and J. C. Chen: Appl. Surf. Sci. 255 (2008) 2494.
- (2008) Appl. Surf. Sci. , vol.255 , pp. 2494
- Chung, J.L.¹ Chen, J.C.²

21
- 10644287533
- S. S. Lin, J. L. Huang, and D. F. Lii: Mater. Chem. Phys. 90 (2005) 22.
- (2005) Mater. Chem. Phys. , vol.90 , pp. 22
- Lin, S.S.¹ Huang, J.L.² Lii, D.F.³

22
- 1342281341
- Y. M. Lu, C. M. Chang, and S. I. Tsai: Thin Solid Films 447-448 (2004) 56.
- (2004) Thin Solid Films , vol.447-448 , pp. 56
- Lu, Y.M.¹ Chang, C.M.² Tsai, S.I.³

23
- 10944256389
- S. S. Lin, J. L. Huang, and P. Š ajgalik: Surf. Coatings Technol. 191 (2005) 286.
- (2005) Surf. Coatings Technol. , vol.191 , pp. 286
- Lin, S.S.¹ Huang, J.L.² Šajgalik, P.³

24
- 38949085924
- J. L. Chung, J. C. Chen, and C. J. Tseng: Appl. Surf. Sci. 254 (2008) 2615.
- (2008) Appl. Surf. Sci. , vol.254 , pp. 2615
- Chung, J.L.¹ Chen, J.C.² Tseng, C.J.³

25
- 79251593482
- J. H. Oh, K. K. Kim, and T. Y. Seong: Appl. Surf. Sci. 257 (2011) 2731.
- (2011) Appl. Surf. Sci. , vol.257 , pp. 2731
- Oh, J.H.¹ Kim, K.K.² Seong, T.Y.³

26
- 43949099940
- J. C. Lin and K. C. Peng: Thin Solid Films 516 (2008) 5349.
- (2008) Thin Solid Films , vol.516 , pp. 5349
- Lin, J.C.¹ Peng, K.C.²

27
- 65649095188
- J. C. Lin and K. C. Peng: Thin Solid Films 517 (2009) 4715.
- (2009) Thin Solid Films , vol.517 , pp. 4715
- Lin, J.C.¹ Peng, K.C.²

28
- 78650261548
- T. Wang, Y. Liu, and Q. Fang: Appl. Surf. Sci. 257 (2011) 2341.
- (2011) Appl. Surf. Sci. , vol.257 , pp. 2341
- Wang, T.¹ Liu, Y.² Fang, Q.³

29
- 0033315498
- Y. J. Kim and H. J. Kim: Mater. Lett. 41 (1999) 159.
- (1999) Mater. Lett. , vol.41 , pp. 159
- Kim, Y.J.¹ Kim, H.J.²

30
- 22144438031
- B. Y. Oh, M. C. Jeong, D. S. Kim, and W. Lee: J. Cryst. Growth 281 (2005) 475.
- (2005) J. Cryst. Growth , vol.281 , pp. 475
- Oh, B.Y.¹ Jeong, M.C.² Kim, D.S.³ Lee, W.⁴

31
- 17044384177
- X. Yu, J. Ma, F. Ji, Y. Wang, and C. Cheng: Appl. Surf. Sci. 245 (2005) 310.
- (2005) Appl. Surf. Sci. , vol.245 , pp. 310
- Yu, X.¹ Ma, J.² Ji, F.³ Wang, Y.⁴ Cheng, C.⁵

32
- 0003427458
- Addison-Wesley, Reading, MA
- B. D. Cullity: Elements of X-ray Diffraction (Addison-Wesley, Reading, MA, 1967).
- (1967) Elements of X-ray Diffraction
- Cullity, B.D.¹

33
- 80255132081
- J. H. Kang and M. H. Lee: Curr. Appl. Phys. 11 (2011) S333.
- (2011) Curr. Appl. Phys. , vol.11
- Kang, J.H.¹ Lee, M.H.²

34
- 25144462707
- Ü . Ö zgür, Ya. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doǧan, V. Avrutin, S.-J. Cho, and H. Morkoç: J. Appl. Phys. 98 (2005) 041301.
- (2005) J. Appl. Phys. , vol.98 , pp. 041301
- Özgür, Ü.¹ Alivov, Y.I.² Liu, C.³ Teke, A.⁴ Reshchikov, M.A.⁵ Doǧan, S.⁶ Avrutin, V.⁷ Cho, S.-J.⁸ Morkoç, H.⁹

35
- 82155185179
- B. Houng and H. B. Chen: Ceram. Int. 38 (2012) 801.
- (2012) Ceram. Int. , vol.38 , pp. 801
- Houng, B.¹ Chen, H.B.²

36
- 0003759821
- IOP Publishing, Bristol, U.K.
- H. L. Hartnagel and A. L. Dawar: Semiconducting Transparent Thin Films (IOP Publishing, Bristol, U.K., 1995).
- (1995) Semiconducting Transparent Thin Films
- Hartnagel, H.L.¹ Dawar, A.L.²

37
- 33646202250
- E. Burstein: Phys. Rev. 93 (1954) 632.
- (1954) Phys. Rev. , vol.93 , pp. 632
- Burstein, E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.