Transparent conducting Sc-codoped AZO film prepared from ZnO:Al-Sc by RF-DC sputtering

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5349-5354

  Lin, Jing Chie ^a   Peng, Kun Cheng ^a   Liao, Hsueh Lung ^a   Lee, Sheng Long ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Annealing; Columnar grains; Corrosion characteristic; Resistivity; Sc doped ZnO:Al film

Indexed keywords

ANNEALING; CONDUCTIVE FILMS; CORROSION RESISTANCE; DC MACHINERY; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; LIGHT TRANSMISSION; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

CODOPED FILMS; CODOPING; COLUMNAR GRAINS; RF DC SPUTTERING; RF POWER SOURCES;

THIN FILMS;

EID: 43949099940     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.096     Document Type: Article

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