Transparent conductive characteristics of Ti:ITO films deposited by RF magnetron sputtering at low substrate temperature

Surface and Coatings Technology

Volumn 205, Issue SUPPL. 1, 2010, Pages

  Paeng, Sung Hwan ^a   Park, Min Woo ^a   Sung, Youl Moon ^a  

^a Kyungsung University   (South Korea)

Author keywords

Dye sensitized solar cell; RF magnetron sputtering; Ti:ITO film; Transparent conductive oxide

Indexed keywords

ANNEALING TEMPERATURES; B-Y IONS; COUNTER ELECTRODES; DYE-SENSITIZED SOLAR CELL; ELECTRICAL AND OPTICAL PROPERTIES; FILM STRUCTURE; INDIUM TIN OXIDE; ITO FILMS; LIGHT INTENSITY; LOW SUBSTRATE TEMPERATURE; METAL OXIDE FILM; PHOTOCONVERSION EFFICIENCY; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; SERIES RESISTANCES; TARGET TYPE; TI:ITO FILM; TIO; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE OXIDES;

CONDUCTIVE FILMS; ELECTRIC PROPERTIES; INDIUM; MAGNETRON SPUTTERING; METALLIC COMPOUNDS; OPTICAL PROPERTIES; PHOTOELECTROCHEMICAL CELLS; SOLAR CELLS; TIN; TITANIUM; TITANIUM OXIDES;

OXIDE FILMS;

EID: 78649932230     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.07.094     Document Type: Article

References (18)

1. Grätzel M. Nature 2001, 414:338.
2. O' Regan B., Grätzel M. Nature 1991, 353:737.
3. Delahoy Alan E., Chen Liangfan, Akhtar Masud, Sang Baosheng, Guo Sheyu Solar Energy 2004, 77:785.
4. Nishio Y., Sei T., Tsuchiya T. J. Mater. Sci. 1996, 31:1761.
5. Tahar R.B.H., Ban T., Ohya Y., Takahashi Y. J. Appl. Phys. 1998, 83:2139.
6. Major S., Chopra K.L. Sol. Energy Mater. 1988, 17:319.
7. Han D.W., Heo J.H., Kwak D.J., Han C.H., Sung Y.M. J. Electr. Eng. Technol. 2009, 4:93.
8. Sheu J.K., Su Y.K., Chi G.C., Jou M.J., Chang C.M. Appl. Phys. Lett. 1999, 72:3317.
9. Heo J.H., Jung K.Y., Kwak D.J., Lee D.K., Sung Y.M. IEEE Trans. Plasma Sci. 2009, 37:1586.
10. Goto K., Kawashima T., Tanabe N. Sol. Energy Mater. Sol. Cells 2006, 90:3251.
11. Kalyanasundaram, Grätzel M. Coord. Chem. Rev. 1998, 177:347.
12. Kashiwa Y., Yoshida Y., Hayase S. Appl. Phys. Lett. 2008, 92:033308.
13. Kawashima T., Matsui H., Tanabe N. Thin Solid Films 2003, 445:241.
14. Okada K., Matsui H., Kawashima T., Ezure T., Tanabe N. J. Photochem. Photobiol. A: Chem. 2004, 164:193.
15. Cui H.-N., Xi S.-Q. Thin Solid Films 1996, 288:325.
16. Morgan D.V., Aliyu Y.H., Bunce R.W., Salehi A. Thin Solid Films 1998, 312:268.
17. Burstein E. Phys. Rev. 1954, 93:632.
18. Hagfeldt A., Kikriksson B., Parmqvist T., Lindström H., Södergren S., Rensmo H., Lindquist S. Solar Energy Mater. Solar Cells 1994, 31:481.