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Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5022-5027

Effects of substrate heating and film thickness on properties of silver-based ZnO multilayer thin films

(3) Rim, You Seung a Kim, Sang Mo a Kim, Kyung Hwan a

a Gachon University (South Korea)

Author keywords

Ag; Multilayer; TCO; Zno

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; FIELD EMISSION; FILM PREPARATION; MICROSCOPIC EXAMINATION; MULTILAYER FILMS; OPTICAL MICROSCOPY; OPTICAL MULTILAYERS; SEMICONDUCTING ZINC COMPOUNDS; SHEET RESISTANCE; SILVER; SOLIDS; SUBSTRATES; THICK FILMS; THIN FILM DEVICES; THIN FILMS; ZINC ALLOYS; ZINC OXIDE;

AG; ATOMIC FORCES; DEPOSITION TIMES; ELECTRICAL; FACING TARGET SPUTTERING; FIELD EMISSION SCANNING ELECTRON MICROSCOPIES; GLASS SUBSTRATES; MULTILAYER THIN FILMS; OPTICAL CHARACTERISTICS; OPTIMUM CONDITIONS; SPECTRAL RANGES; SUBSTRATE HEATING; SUBSTRATE TEMPERATURES; TCO; ZNO; ZNO THIN FILMS;

MULTILAYERS;

EID: 55049130509 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.5022 Document Type: Article

Times cited : (22)

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