The annealing effect on damp heat stability of AGZO thin films prepared by DC moving magnetron sputtering

Current Applied Physics

Volumn 11, Issue 3 SUPPL., 2011, Pages

  Kang, Jong Ho ^a,b   Lee, Myung Hyun ^a   Kim, Dae Wook ^a,b   Lim, Young Soo ^a   Seo, Won Seon ^a   Choi, Heon Jin ^b  

^a Korea Institute of Ceramic Engineering and Technology (KICET)   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

AGZO; Damp heat stability; DC sputtering; TCO

Indexed keywords

AGZO; ANALYTICAL METHOD; ANNEALING EFFECTS; CO-DOPED ZNO; DAMP HEAT; DAMP HEAT STABILITY; DC SPUTTERING; ELECTRICAL , OPTICAL AND STRUCTURAL PROPERTIES; IN-VACUUM; ROOM TEMPERATURE; TCO;

ANNEALING; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; GALLIUM; HEAT RESISTANCE; SHEET RESISTANCE; THERMODYNAMIC STABILITY; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

FILM PREPARATION;

EID: 80255132081     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2011.01.014     Document Type: Conference Paper

References (19)

1. K. Matsubara, P. Fons, K. Iwata, A. Yamada, K. Sakurai, H. Tampo, and S. Niki Thin Solid Films 431 2003 369
2. K.-S. WeiBenrieder, and J. Miiller Thin Solid Films 300 1997 30
3. G.A. Hirata, J. McKittrick, T. Cheeks, J.M. Siqueiros, J.A. Diaz, O. Contreras, and O.A. Lopez Thin Solid Films 288 1996 29
4. R. Ayouchi, D. Leinen, F. Martín, M. Gabas, E. Dalchiele, and J.R. Ramos-Barrado Thin Solid Films 426 2003 68
5. Y.R. Park, E.K. Kim, D.G. Jung, T.S. Park, and Y.S. Kim Appl. Surf. Sci. 254 2008 2250
6. K.S. Nam, H.J. Lee, S.H. Lee, G.H. Lee, Y. Song, and D.Y. Lee Surf. Coat. Technol. 210 2006 2567
7. S.M. Hyun, K. Hong, and B.H. Kim J. Korean Ceram. Soc. 33 1996 149
8. P. Viswanathamurthi, N. Bhattarai, H.Y. Kim, and D.R. Lee Nanotechnology 15 2004 320
9. X. Hao, L. Tan, K. Ong, and F. Zhu J. Crystal Growth 287 2006 44
10. S. Park, T. Ikegami, and K. Ebihara Thin Solid Films 513 2006 90
11. W.W. Wenas, A. Yamada, K. Takahashi, M. Yoshino, and M. Konagai J. Appl. Phys 70 1991 7119
12. T. Minami, H. Nanto, and S. Takata Jpn. J. Appl. Phys. 23 1984 L280 L282
13. H. Kato, M. Sano, K. Miyamoto, and T. Yao J. Crystal Growth 237-239 2002 538
14. T. Minami, T. Kuboi, T. Miyata, and Y. Ohtani Phys. Stat. Sol. (a) 205 2 2008 255
15. T. Minami, T. Miyata, Y. Ohtani, and T. Kuboi Phys. Stat. Sol. (RRL) 1 2007 R31
16. R. Wei Lin, J. Ma, B. Xue, and Kang Solar Energy Mater. Solar Cells Solar 91 2007 1902
17. M.K. Puchert, P.Y. Timbrell, and R.N. Lamb J. Vac. Sci. Technol. A 14 4 1996 2220
18. C. Guillen, and J. Herrero Surf. Coat. Technol. 201 2006 309
19. D. Elizabeth Pugel, R.D. Vispute, S.S. Hullavarad, T. Venkatesan, and B. Varughese Appl. Surf. Sci. 254 2008 2220