Tailoring the composition of lead zirconate titanate by atomic layer deposition

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 31, Issue 1, 2013, Pages

  Choi, Ju H ^a   Zhang, Feng ^a   Perng, Ya Chuan ^a   Chang, Jane P ^a  

^a Engineering IV   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC FILMS; FERROELECTRICITY; LEAD; SEMICONDUCTING LEAD COMPOUNDS; STOICHIOMETRY; TITANIUM; TITANIUM OXIDES; ZIRCONIA; ZIRCONIUM;

DEVICE APPLICATION; FERROELECTRIC AND PIEZOELECTRIC PROPERTIES; INCUBATION TIME; LEAD ZIRCONATE TITANATE; PIEZORESPONSE FORCE MICROSCOPY; POST DEPOSITION ANNEALING; PZT FILM; ULTRA-THIN;

ATOMIC LAYER DEPOSITION;

EID: 84872695851     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4775789     Document Type: Article

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