Preparation of highly C-axis-oriented PZT films on Si substrate with MgO buffer layer by the sol-gel method

Journal of Physics and Chemistry of Solids

Volumn 69, Issue 2-3, 2008, Pages 593-596

  Shih, Wen Ching ^a   Yen, Zhih Zhong ^a   Liang, Yuan Sung ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

A. Multilayers; A. Thin films; B. Sol gel growth

Indexed keywords

EPITAXIAL GROWTH; FERROELECTRIC DEVICES; LATTICE MISMATCH; SILICON; SURFACE ROUGHNESS;

HIGH GROWTH TEMPERATURE; LEAD ZIRCONATE TITANATE;

SOL-GEL PROCESS;

EID: 38749123178     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2007.07.105     Document Type: Article

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