Liquid injection ALD of Pb (Zr,Ti) Ox thin films by a combination of self-regulating component oxide processes

Journal of the Electrochemical Society

Volumn 154, Issue 12, 2007, Pages

  Watanabe, Takayuki ^a   Hoffmann Eifert, Susanne ^a   Peter, Frank ^a   Mi, Shaobo ^a   Jia, Chunlin ^a   Hwang, Cheol Seong ^b,c   Waser, Rainer ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b Seoul National University   (South Korea)

^c ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; BINARY MIXTURES; LEAD COMPOUNDS; OXIDE FILMS;

CATALYTIC DECOMPOSITIONS; INHOMOGENEOUS CATION COMPOSITIONS; LIQUID INJECTIONS; VAPORIZERS;

THIN FILMS;

EID: 35549000100     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2789295     Document Type: Article

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