Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors

Optical Materials Express

Volumn 2, Issue 11, 2012, Pages 1571-1579

  Arriola, Alexander ^a,b   Rodriguez, Ainara ^c   Perez, Noemi ^a   Tavera, Txaber ^a   Withford, Michael J ^b   Fuerbach, Alexander ^b   Olaizola, Santiago M ^a  

^a CEIT   (Spain)

^b MACQUARIE UNIVERSITY   (Australia)

^c CIC MICROGUNE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AU FILM; GRATING STRUCTURES; HIGH QUALITY; METALLIC GRATINGS; NANOSECOND LASERS; PHOTOSENSITIVE LAYERS; PLASMONIC; PULSED LASER INTERFERENCE; RESONANCE RESPONSE; SPR SENSORS; SUBMICRON;

DIFFRACTION GRATINGS; FABRICATION; GOLD; HIGH ENERGY LASERS;

NEODYMIUM LASERS;

EID: 84870382099     PISSN: None     EISSN: 21593930     Source Type: Journal    
DOI: 10.1364/OME.2.001571     Document Type: Article

References (34)

1. F. Yu, P. Li, H. Shen, S. Mathur, C. M. Lehr, U. Bakowsky, and F. Mücklich, "Laser interference lithography as a new and efficient technique for micropatterning of biopolymer surface," Biomaterials 26(15), 2307-2312 (2005).
2. B. Päivänranta, P. Baroni, T. Scharf, W. Nakagawa, M. Kuittinen, and H. P. Herzig, "Antireflective nanostructured microlenses," Microelectron. Eng. 85(5-6), 1089-1091 (2008).
3. J. Homola, S. S. Yee, and G. Gauglitz, "Surface plasmon resonance sensors: review," Sens. Actuators B Chem. 54(1-2), 3-15 (1999).
4. R. W. Wood, "On a remarkable case of uneven distribution of light in a diffraction grating spectrum," Proc. Phys. Soc. Lond. 18(1), 269-275 (1901).
5. G. Nemova and R. Kashyap, "A compact integrated planar-waveguide refractive-index sensor based on a corrugated metal grating," J. Lightwave Technol. 25(8), 2244-2250 (2007).
6. E. Kretschmann and H. Raether, "Radiative decay of non-radiative surface plasmons excited by light," Z. Naturforsch. B 23A, 2135-2136 (1968).
7. A. Otto, "Excitation of nonradiative surface plasma waves in silver by the method of frustrated total reflection," Z. Phys. 216(4), 398-410 (1968).
8. K.-Y. Hwang, S.-Y. Jeong, Y.-R. Kim, K. Namkoong, H.-K. Lim, W.-S. Chung, J.-H. Kim, and N. Huh, "Rapid detection of bacterial cell from whole blood: Integration of DNA sample preparation into single micro-PCR chip," Sens. Actuators B Chem. 154(1), 46-51 (2011).
9. D. Bratton, D. Yang, J. Dai, and C. K. Ober, "Recent progress in high resolution lithography," Polym. Adv. Technol. 17(2), 94-103 (2006).
10. F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, "Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination," Opt. Lett. 34(3), 271-273 (2009).
11. A. Cattoni, E. Cambril, D. Decanini, G. Faini, and A. M. Haghiri-Gosnet, "Soft UV-NIL at 20 nm scale using flexible bi-layer stamp casted on HSQ master mold," Microelectron. Eng. 87(5-8), 1015-1018 (2010).
12. Y. Fu, N. Bryan, and W. Zhou, "Quasi-direct writing of diffractive structures with a focused ion beam," Opt. Express 12(9), 1803-1809 (2004).
13. X. Li, Q. Wang, J. Zhang, W. Zhou, Y. Liu, Y. Wan, and X. Niu, "Large area nanosize array stamp for UV-based nanoimprint lithography fabricated by size reduction process," Microelectron. Eng. 86(10), 2015-2019 (2009).
14. C.-S. Kim, S.-H. Ahn, and D.-Y. Jang, "Review: developments in micro/nanoscale fabrication by focused ion beams," Vacuum 86(8), 1014-1035 (2012).
15. S. Y. Chuang, H. L. Chen, S. S. Kuo, Y. H. Lai, and C. C. Lee, "Using direct nanoimprinting to study extraordinary transmission in textured metal films," Opt. Express 16(4), 2415-2422 (2008).
16. A. A. Baski, "Fabrication of nanoscale structures using STM and AFM," Appl. Surf. Sci. 3, 271-277 (2002).
17. G. Luo, G. Xie, Y. Zhang, G. Zhang, Y. Zhang, P. Carlberg, T. Zhu, and Z. Liu, "Scanning probe lithography for nanoimprinting mould fabrication," Nanotechnology 17(12), 3018-3022 (2006).
18. S. Zankovych, T. Hoffmann, J. Seekamp, J.-U. Bruch, and C. M. S. Torres, "Nanoimprint lithography: challenges and prospects," Nanotechnology 12(2), 91-95 (2001).
19. A. Rodriguez, M. Echeverría, M. Ellman, N. Perez, Y. K. Verevkin, C. S. Peng, T. Berthou, Z. Wang, I. Ayerdi, J. Savall, and S. M. Olaizola, "Laser interference lithography for nanoscale structuring of materials: from laboratory to industry," Microelectron. Eng. 86(4-6), 937-940 (2009).
20. A. Lasagni, C. Holzapfel, T. Weirich, and F. Mucklich, "Laser interference metallurgy: a new method for periodic surface microstructure design on multilayered metallic thin films," Appl. Surf. Sci. 253(19), 8070-8074 (2007).
21. Z. Pang and X. Zhang, "Direct writing of large-area plasmonic photonic crystals using single-shot interference ablation," Nanotechnology 22(14), 145303 (2011).
22. C. H. Liu, M. H. Hong, M. C. Lum, H. Flotow, F. Ghadessy, and J. B. Zhang, "Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching," Appl. Phys., A Mater. Sci. Process. 101(2), 237-241 (2010).
23. C. H. Liu, M. H. Hong, H. W. Cheung, F. Zhang, Z. Q. Huang, L. S. Tan, and T. S. A. Hor, "Bimetallic structure fabricated by laser interference lithography for tuning surface plasmon resonance," Opt. Express 16(14), 10701-10709 (2008).
24. H. Shin, H. Yoo, and M. Lee, "Fabrication of Au thin film gratings by pulsed laser interference," Appl. Surf. Sci. 256(9), 2944-2947 (2010).
25. K. Du, I. Wathuthanthri, W. D. Mao, W. Xu, and C. H. Choi, "Large-area pattern transfer of metallic nanostructures on glass substrates via interference lithography," Nanotechnology 22(28), 285306 (2011).
26. E. Molotokaité, M. Gedvilas, G. Raciukaitis, and V. Girdauskas, "Picosecond laser beam interference ablation of thin metal films on glass substrate," J. Laser Micro/Nanoeng. 5(1), 74-79 (2010).
27. J. J. J. Kaakkunen, K. Paivasaari, and P. Vahimaa, "Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation," Appl. Phys., A Mater. Sci. Process. 103(2), 267-270 (2011).
28. A. Lasagni, M. D'Alessandria, R. Giovanelli, and F. Mücklich, "Advanced design of periodical architectures in bulk metals by means of laser interference metallurgy," Appl. Surf. Sci. 254(4), 930-936 (2007).
29. P. Rodríguez-Franco, A. Arriola, N. Darwish, H. Keshmiri, T. Tavera, S. M. Olaizola, and M. Moreno, "Fabrication of broad area optical nanostructures for high throughput chemical sensing," in Proceedings IMCS 2012-The 14th International Meeting on Chemical Sensors (2012).
30. M. Ellman, A. Rodríguez, N. Pérez, M. Echeverria, Y. K. Verevkin, C. S. Peng, T. Berthou, Z. Wang, S. M. Olaizola, and I. Ayerdi, "High-power laser interference lithography process on photoresist: effect of laser fluence and polarisation," Appl. Surf. Sci. 255(10), 5537-5541 (2009).
31. Z. Sun, Y. S. Jung, and H. K. Kim, "Role of surface plasmons in the optical interaction in metallic gratings with narrow slits," Appl. Phys. Lett. 83(15), 3021-3023 (2003).
32. Q. Cao and P. Lalanne, "Negative role of surface plasmons in the transmission of metallic gratings with very narrow slits," Phys. Rev. Lett. 88(5), 057403 (2002).
33. M. M. J. Treacy, "Dynamical diffraction explanationof the anomalous transmission of light through metallic gratings," Phys. Rev. B 66(19), 195105 (2002).
34. C. K. Hu, "Surface plasmon resonance sensor based on diffraction grating with high sensitivity and high resolution," Optik (Stuttg.) 122(21), 1881-1884 (2011).