Fabrication of Au thin film gratings by pulsed laser interference

Applied Surface Science

Volumn 256, Issue 9, 2010, Pages 2944-2947

  Shin, Hyunkwon ^a   Yoo, Hyeonggeun ^a   Lee, Myeongkyu ^a  

^a Yonsei University   (South Korea)

Author keywords

Grating; Interference; Metal thin film patterning; Pulse laser

Indexed keywords

FABRICATION; LASER BEAMS; SUBSTRATES; THIN FILMS; WAVE INTERFERENCE; YTTRIUM ALUMINUM GARNET;

GRATING; METAL THIN FILM; MINIMUM FEATURE SIZES; ND-YAG PULSED LASERS; PULSE LASER; PULSED LASER INTERFERENCE; TRANSMISSION GRATINGS; TWO DIMENSIONAL (2 D);

PULSED LASERS;

EID: 75249095744     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.11.055     Document Type: Article

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