Antireflective nanostructured microlenses

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1089-1091

  Päivänranta, Birgit ^a   Baroni, Pierre Yves ^b   Scharf, Toralf ^b   Nakagawa, Wataru ^b   Kuittinen, Markku ^a   Herzig, Hans Peter ^b  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Antireflection; Interferometric lithography; Microlenses

Indexed keywords

LITHOGRAPHY; MICROLENSES; REFRACTIVE INDEX; WAVELENGTH;

ANTIREFLECTION; ILLUMINATION SYSTEMS; INTERFEROMETRIC LITHOGRAPHY;

NANOSTRUCTURES;

EID: 44149090798     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.011     Document Type: Article

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