Mechanically robust silica-like coatings deposited by microwave plasmas for barrier applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 6, 2012, Pages

  Maria Coclite, Anna ^a   De Luca, François ^b   Gleason, Karen K ^a  

^a Massachusetts Institute of Technology   (United States)

^b TOTAL   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER COATINGS; BARRIER PERFORMANCE; BARRIER PROPERTIES; COMPRESSION STRAIN; DOWN-STREAM PLASMAS; HIGH POWER; MECHANICALLY ROBUST; MICROWAVE PLASMA; OPTICAL TRANSPARENCY; ORDERS OF MAGNITUDE; POST-DISCHARGE; PULSED DISCHARGE; RECYCLABILITY; THIN METALLIC COATINGS;

ALUMINUM COATINGS; COATINGS; DEPOSITS; ELASTICITY; ION BOMBARDMENT; MICROWAVES; POROUS SILICON; SILICA;

ELECTRIC DISCHARGES;

EID: 84870037379     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4748804     Document Type: Article

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