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Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 11, 2001, Pages 1154291-1154299

Structural properties of silicon dioxide thin films densified by medium-energy particles

(4) Lefèvre, Alexis a Lewis, Laurent J a Martinu, Ludvik a Wertheimer, Michael R a

a ÉCOLE POLYTECHNIQUE DE MONTRÉAL (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON DIOXIDE;

ARTICLE; CHEMICAL STRUCTURE; ENERGY; FILM; HYPERBARISM; MOLECULAR DYNAMICS; POLYMERIZATION; STRESS; STRUCTURE ANALYSIS; SURFACE PROPERTY; THERMAL ANALYSIS;

EID: 0035884329 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: 10.1103/physrevb.64.115429 Document Type: Article

Times cited : (39)

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