SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 524, Issue , 2012, Pages 81-85

Solution derived ZnO:Al films with low resistivity

(6) Schellens, K a Capon, B b,c De Dobbelaere, C a Detavernier, C b,c Hardy, A a,c Van Bael, M K a,c

a HASSELT UNIVERSITY (Belgium)

b GHENT UNIVERSITY (Belgium)

c IMEC (Belgium)

Author keywords

c Axis orientation; Low resistivity; Thin film; Transparent conductive oxide; ZnO:Al

Indexed keywords

2-METHOXYETHANOL; BOROSILICATE GLASS SUBSTRATES; C-AXIS ORIENTATIONS; CHEMICAL SOLUTION DEPOSITION; DEPOSITED FILMS; DOPANT CONCENTRATIONS; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL RESISTIVITY; LOW RESISTIVITY; PRECURSOR SOLUTIONS; TRANSPARENT CONDUCTIVE OXIDES; TWO-POINT CONTACT; UV-VIS SPECTROPHOTOMETRY; XRD; XRD MEASUREMENTS; ZNO; ZNO:AL FILMS; ZNO:AL THIN FILMS;

BOROSILICATE GLASS; DEPOSITS; ELECTRIC CONDUCTIVITY; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC OXIDE;

ALUMINUM;

EID: 84869505921 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.09.059 Document Type: Article

Times cited : (14)

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