Productivity enhancements for shallow junctions and DRAM applications using infusion doping

AIP Conference Proceedings

Volumn 866, Issue , 2006, Pages 174-177

  Hautala, John ^a   Gwinn, Matt ^a   Skinner, Wes ^a   Shao, Yan ^a  

^a Epion Corporation   (United States)

Author keywords

Gas cluster; GCIB; Infusion doping; Poly doping; Ultra shallow junctions; USJ

Indexed keywords

EID: 33846982256     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2401488     Document Type: Conference Paper

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