SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 101, Issue , 2013, Pages 12-16

Fabrication of two-dimensional hard X-ray diffraction gratings

(7) Rutishauser, S a Bednarzik, M a Zanette, I b,c Weitkamp, T b,d Borner M e Mohr, J e David, C a

a PAUL SCHERRER INSTITUTE (Switzerland)

b EUROPEAN SYNCHROTRON RADIATION FACILITY (France)

c TECHNICAL UNIVERSITY OF MUNICH (Germany)

d SYNCHROTRON SOLEIL (France)

e KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

Author keywords

Deep reactive ion etching; Gold electroplating; Grating interferometry; Phase contrast imaging; X ray imaging; X ray metrology

Indexed keywords

DEEP REACTIVE ION ETCHING; GOLD ELECTROPLATING; GRATING INTERFEROMETRY; PHASE-CONTRAST IMAGING; X-RAY METROLOGY; XRAY IMAGING;

ASPECT RATIO; ELECTROPLATING; GOLD; INTERFEROMETRY; OPTICS; TWO DIMENSIONAL; X RAY DIFFRACTION;

DIFFRACTION GRATINGS;

EID: 84867537615 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.08.025 Document Type: Article

Times cited : (42)

References (35)

1
- 0002520458
- R. Fitzgerald Phys. Today 53 7 2000 23
- (2000) Phys. Today , vol.53 , Issue.7 , pp. 23
- Fitzgerald, R.¹

2
- 31544450749
- A. Momose Jpn. J. Appl. Phys. 44 2005 6355 6367
- (2005) Jpn. J. Appl. Phys. , vol.44 , pp. 6355-6367
- Momose, A.¹

3
- 77649185472
- M. Bech, T.H. Jensen, O. Bunk, T. Donath, C. David, T. Weitkamp, G.L. Duc, A. Bravin, P. Cloetens, and F. Pfeiffer Z. Med. Phys. 20 1 2010 7 16
- (2010) Z. Med. Phys. , vol.20 , Issue.1 , pp. 7-16
- Bech, M.¹ Jensen, T.H.² Bunk, O.³ Donath, T.⁴ David, C.⁵ Weitkamp, T.⁶ Duc, G.L.⁷ Bravin, A.⁸ Cloetens, P.⁹ Pfeiffer, F.¹⁰

4
- 79957992651
- C. David, B. Nöhammer, H. Solak, and E. Ziegler Appl. Phys. Lett. 81 2002 3287 3289
- (2002) Appl. Phys. Lett. , vol.81 , pp. 3287-3289
- David, C.¹ Nöhammer, B.² Solak, H.³ Ziegler, E.⁴

5
- 0141606690
- A. Momose, S. Kawamoto, I. Koyama, Y. Hamaishi, K. Takai, and Y. Suzuki Jpn. J. Appl. Phys. 42 2003 866 868
- (2003) Jpn. J. Appl. Phys. , vol.42 , pp. 866-868
- Momose, A.¹ Kawamoto, S.² Koyama, I.³ Hamaishi, Y.⁴ Takai, K.⁵ Suzuki, Y.⁶

6
- 24044538888
- T. Weitkamp, A. Diaz, C. David, F. Pfeiffer, M. Stampanoni, P. Cloetens, and E. Ziegler Opt. Express 13 2005 6296 6304
- (2005) Opt. Express , vol.13 , pp. 6296-6304
- Weitkamp, T.¹ Diaz, A.² David, C.³ Pfeiffer, F.⁴ Stampanoni, M.⁵ Cloetens, P.⁶ Ziegler, E.⁷

7
- 33645795432
- F. Pfeiffer, T. Weitkamp, O. Bunk, and C. David Nat. Phys. 2 2006 258 261
- (2006) Nat. Phys. , vol.2 , pp. 258-261
- Pfeiffer, F.¹ Weitkamp, T.² Bunk, O.³ David, C.⁴

8
- 77954088018
- T. Donath, F. Pfeiffer, O. Bunk, C. Grunzweig, E. Hempel, S. Popescu, P. Vock, and C. David Invest. Radiol. 45 2010 445 452
- (2010) Invest. Radiol. , vol.45 , pp. 445-452
- Donath, T.¹ Pfeiffer, F.² Bunk, O.³ Grunzweig, C.⁴ Hempel, E.⁵ Popescu, S.⁶ Vock, P.⁷ David, C.⁸

9
- 81855161636
- M. Stampanoni, Z. Wang, T. Thuring, C. David, E. Roessl, M. Trippel, R.A. Kubik-Huch, G. Singer, M.K. Hohl, and N. Hauser Invest. Radiol. 46 2011 801 806
- (2011) Invest. Radiol. , vol.46 , pp. 801-806
- Stampanoni, M.¹ Wang, Z.² Thuring, T.³ David, C.⁴ Roessl, E.⁵ Trippel, M.⁶ Kubik-Huch, R.A.⁷ Singer, G.⁸ Hohl, M.K.⁹ Hauser, N.¹⁰

10
- 18644362806
- T. Weitkamp, B. Nöhammer, A. Diaz, C. David, and E. Ziegler Appl. Phys. Lett. 86 2005 054101
- (2005) Appl. Phys. Lett. , vol.86 , pp. 054101
- Weitkamp, T.¹ Nöhammer, B.² Diaz, A.³ David, C.⁴ Ziegler, E.⁵

11
- 77951476050
- A. Diaz, C. Mocuta, J. Strangl, M. Keplinger, T. Weitkamp, F. Pfeiffer, C. David, T.H. Metzger, and G. Bauer J. Synchrotron Radiat. 17 2010 299 307
- (2010) J. Synchrotron Radiat. , vol.17 , pp. 299-307
- Diaz, A.¹ Mocuta, C.² Strangl, J.³ Keplinger, M.⁴ Weitkamp, T.⁵ Pfeiffer, F.⁶ David, C.⁷ Metzger, T.H.⁸ Bauer, G.⁹

12
- 80051715796
- H. Wang, K. Sawhney, S. Berujon, E. Ziegler, S. Rutishauser, and C. David Opt. Express 19 2011 16550 16559
- (2011) Opt. Express , vol.19 , pp. 16550-16559
- Wang, H.¹ Sawhney, K.² Berujon, S.³ Ziegler, E.⁴ Rutishauser, S.⁵ David, C.⁶

13
- 84864844414
- S. Rutishauser, L. Samoylova, J. Krzywinski, O. Bunk, J. Grünert, H. Sinn, M. Cammarata, D.M. Fritz, and C. David Nat. Commun. 3 2012 947
- (2012) Nat. Commun. , vol.3 , pp. 947
- Rutishauser, S.¹ Samoylova, L.² Krzywinski, J.³ Bunk, O.⁴ Grünert, J.⁵ Sinn, H.⁶ Cammarata, M.⁷ Fritz, D.M.⁸ David, C.⁹

14
- 38549083797
- F. Pfeiffer, M. Bech, O. Bunk, P. Kraft, E.F. Eikenberry, Ch. Brönnimann, C. Grünzweig, and C. David Nat. Mater. 7 2008 134 137
- (2008) Nat. Mater. , vol.7 , pp. 134-137
- Pfeiffer, F.¹ Bech, M.² Bunk, O.³ Kraft, P.⁴ Eikenberry, E.F.⁵ Brönnimann, Ch.⁶ Grünzweig, C.⁷ David, C.⁸

15
- 18144413137
- F. Pfeiffer, O. Bunk, C. Schulze-Briese, A. Diaz, T. Weitkamp, C. David, J.F. van der Veen, I. Vartanyants, and I.K. Robinson Phys. Rev. Lett. 94 2005 164801
- (2005) Phys. Rev. Lett. , vol.94 , pp. 164801
- Pfeiffer, F.¹ Bunk, O.² Schulze-Briese, C.³ Diaz, A.⁴ Weitkamp, T.⁵ David, C.⁶ Van Der Veen, J.F.⁷ Vartanyants, I.⁸ Robinson, I.K.⁹

16
- 78649806074
- I. Zanette, T. Weitkamp, T. Donath, S. Rutishauser, and C. David Phys. Rev. Lett. 105 2010 248102
- (2010) Phys. Rev. Lett. , vol.105 , pp. 248102
- Zanette, I.¹ Weitkamp, T.² Donath, T.³ Rutishauser, S.⁴ David, C.⁵

17
- 79951588109
- H. Itoh, K. Nagai, G. Sato, K. Yamaguchi, T. Nakamura, T. Kondoh, C. Ouchi, T. Teshima, Y. Setomoto, and T. Den Opt. Express 19 2011 3339 3346
- (2011) Opt. Express , vol.19 , pp. 3339-3346
- Itoh, H.¹ Nagai, K.² Sato, G.³ Yamaguchi, K.⁴ Nakamura, T.⁵ Kondoh, T.⁶ Ouchi, C.⁷ Teshima, T.⁸ Setomoto, Y.⁹ Den, T.¹⁰

18
- 84862080074
- S. Berujon, H. Wang, I. Pape, K. Sawhney, S. Rutishauser, and C. David Opt. Lett. 37 2012 1622 1624
- (2012) Opt. Lett. , vol.37 , pp. 1622-1624
- Berujon, S.¹ Wang, H.² Pape, I.³ Sawhney, K.⁴ Rutishauser, S.⁵ David, C.⁶

19
- 82955201616
- S. Rutishauser, I. Zanette, T. Weitkamp, T. Donath, and C. David Appl. Phys. Lett. 99 2011 221104
- (2011) Appl. Phys. Lett. , vol.99 , pp. 221104
- Rutishauser, S.¹ Zanette, I.² Weitkamp, T.³ Donath, T.⁴ David, C.⁵

20
- 34247602602
- C. David, J. Bruder, T. Rohbeck, C. Grunzweig, C. Kottler, A. Diaz, O. Bunk, and F. Pfeiffer Microelectron. Eng. 84 2007 1172 1177
- (2007) Microelectron. Eng. , vol.84 , pp. 1172-1177
- David, C.¹ Bruder, J.² Rohbeck, T.³ Grunzweig, C.⁴ Kottler, C.⁵ Diaz, A.⁶ Bunk, O.⁷ Pfeiffer, F.⁸

21
- 33847336380
- M. Matsumoto, K. Takiguchi, M. Tanaka, Y. Hunabiki, H. Takeda, A. Momose, Y. Utsumi, and T. Hattori Microsyst. Technol. 13 2007 543 546
- (2007) Microsyst. Technol. , vol.13 , pp. 543-546
- Matsumoto, M.¹ Takiguchi, K.² Tanaka, M.³ Hunabiki, Y.⁴ Takeda, H.⁵ Momose, A.⁶ Utsumi, Y.⁷ Hattori, T.⁸

22
- 49949111063
- E. Reznikova, J. Mohr, M. Boerner, V. Nazmov, and P.-J. Jakobs Microsyst. Technol. 14 2008 1683 1688
- (2008) Microsyst. Technol. , vol.14 , pp. 1683-1688
- Reznikova, E.¹ Mohr, J.² Boerner, M.³ Nazmov, V.⁴ Jakobs, P.-J.⁵

23
- 0037829285
- J. Primot, and N. Guérineau Appl. Opt. 39 2000 5715 5720
- (2000) Appl. Opt. , vol.39 , pp. 5715-5720
- Primot, J.¹ Guérineau, N.²

24
- 77957985834
- I. Zanette, C. David, S. Rutishauser, and T. Weitkamp AIP Conf. Proc. 1221 2010 73 79
- (2010) AIP Conf. Proc. , vol.1221 , pp. 73-79
- Zanette, I.¹ David, C.² Rutishauser, S.³ Weitkamp, T.⁴

25
- 0033131626
- C. David, and D. Hambach Microelectron. Eng. 46 1999 219 222
- (1999) Microelectron. Eng. , vol.46 , pp. 219-222
- David, C.¹ Hambach, D.²

26
- 0035450640
- B. Schnabel, and E.B. Kley Microelectron. Eng. 57-58 2001 327 333
- (2001) Microelectron. Eng. , vol.57-58 , pp. 327-333
- Schnabel, B.¹ Kley, E.B.²

27
- 0035450758
- C. David, D. Wiesmann, R. Germann, F. Horst, B.J. Offrein, R. Beyeler, H.W.M. Salemink, and G.L. Bona Microelectron. Eng. 57-58 2001 713 719
- (2001) Microelectron. Eng. , vol.57-58 , pp. 713-719
- David, C.¹ Wiesmann, D.² Germann, R.³ Horst, F.⁴ Offrein, B.J.⁵ Beyeler, R.⁶ Salemink, H.W.M.⁷ Bona, G.L.⁸

28
- 0038513397
- D. Wiesmann, R. Germann, G.L. Bona, C. David, D. Erni, and H. Jäckel J. Opt. Soc. Am. B 20 2003 417 423
- (2003) J. Opt. Soc. Am. B , vol.20 , pp. 417-423
- Wiesmann, D.¹ Germann, R.² Bona, G.L.³ David, C.⁴ Erni, D.⁵ Jäckel, H.⁶

29
- 79960844799
- K. Engel, D. Geller, T. Köhler, G. Martens, S. Schusser, G. Vogtmeier, and E. Rössl Nucl. Instrum. Methods Phys. Res. A 648 2011 202 207
- (2011) Nucl. Instrum. Methods Phys. Res. A , vol.648 , pp. 202-207
- Engel, K.¹ Geller, D.² Köhler, T.³ Martens, G.⁴ Schusser, S.⁵ Vogtmeier, G.⁶ Rössl, E.⁷

30
- 0035276133
- P. Kleimann, J. Linnros, C. Fröjdh, and C.S. Peterson Nucl. Instrum. Methods Phys. Res. A 460 2001 15 19
- (2001) Nucl. Instrum. Methods Phys. Res. A , vol.460 , pp. 15-19
- Kleimann, P.¹ Linnros, J.² Fröjdh, C.³ Peterson, C.S.⁴

31
- 79960842698
- A. Sahlholm, O. Svenonius, and S. Petersson Nucl. Instrum. Methods Phys. Res. A 648 2011 S16 S19
- (2011) Nucl. Instrum. Methods Phys. Res. A , vol.648
- Sahlholm, A.¹ Svenonius, O.² Petersson, S.³

32
- 79955704014
- S. Rutishauser, I. Zanette, T. Donath, A. Sahlholm, J. Linnros, and C. David Appl. Phys. Lett. 98 2011 171107
- (2011) Appl. Phys. Lett. , vol.98 , pp. 171107
- Rutishauser, S.¹ Zanette, I.² Donath, T.³ Sahlholm, A.⁴ Linnros, J.⁵ David, C.⁶

33
- 84867558530
- L. Yao-Hu, L. Xin, G. Jin-Chuan, Z. Zhi-Gang, and N. Han-Ben Chin. Phys. B 20 2011 042901
- (2011) Chin. Phys. B , vol.20 , pp. 042901
- Yao-Hu, L.¹ Xin, L.² Jin-Chuan, G.³ Zhi-Gang, Z.⁴ Han-Ben, N.⁵

34
- 84867508794
- I. Zanette, T. Weitkamp, T. Donath, S. Rutishauser, and C. David ESRF Highlights 2011 116 117
- (2011) ESRF Highlights , pp. 116-117
- Zanette, I.¹ Weitkamp, T.² Donath, T.³ Rutishauser, S.⁴ David, C.⁵

35
- 77957977199
- T. Weitkamp, P. Tafforeau, E. Boller, P. Cloetens, J.-P. Valade, P. Bernard, F. Peyrin, W. Ludwig, L. Helfen, and J. Baruchel AIP Conf. Proc. 1221 2010 33 38
- (2010) AIP Conf. Proc. , vol.1221 , pp. 33-38
- Weitkamp, T.¹ Tafforeau, P.² Boller, E.³ Cloetens, P.⁴ Valade, J.-P.⁵ Bernard, P.⁶ Peyrin, F.⁷ Ludwig, W.⁸ Helfen, L.⁹ Baruchel, J.¹⁰

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.