Fabrication of diffraction grating for X-ray Talbot interferometer

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 543-546

  Matsumoto, Masatake ^a   Takiguchi, Kinji ^b   Tanaka, Makoto ^b   Hunabiki, Yoichi ^c   Takeda, Hiroaki ^d   Momose, Atsushi ^e   Utsumi, Yuichi ^b   Hattori, Tadashi ^b  

^a Nagase Chemtex Ltd   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c Nanocreate Co Ltd   (Japan)

^d IKEX Industry Co Ltd   (Japan)

^e UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; OPTICAL RESOLVING POWER; SYNCHROTRON RADIATION; X RAYS;

MICRO ELECTROPLATING; TALBOT INTERFEROMETER; X-RAY LITHOGRAPHY;

DIFFRACTION GRATINGS;

EID: 33847336380     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0226-8     Document Type: Article

References (2)

1. Momose A, Fukuda J (1995) Phase-contrast radiographs of non-stained rat cerebellar specimen. Med Phys 22:375
2. Momose A et al (2004) In: Proceedings of SPIE, vol. 5535, pp 352-360