Fabrication of diffraction gratings for hard X-ray phase contrast imaging

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1172-1177

  David, C ^a   Bruder, J ^a   Rohbeck, T ^a   Grunzweig C ^a   Kottler, C ^a   Diaz, A ^a   Bunk, O ^a   Pfeiffer, F ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Anisotropic silicon wet etching; Gold electroplating; Medical imaging; Radiography

Indexed keywords

ANISOTROPY; DIFFRACTION GRATINGS; MEDICAL IMAGING; RADIOGRAPHY; SILICON; WET ETCHING; X RAY ANALYSIS;

ANISOTROPIC SILICON WET ETCHING; GOLD ELECTROPLATING;

MICROFABRICATION;

EID: 34247602602     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.151     Document Type: Article

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