Photonics and electronics integration

Topics in Applied Physics

Volumn 119, Issue , 2011, Pages 217-249

  Fedeli, J M ^a   Ben Bakir, B ^a   Grenouillet, L ^a   Marris Morini, D ^b   Vivien, L ^b  

^a CEA LETI   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84867230247     PISSN: 03034216     EISSN: 14370859     Source Type: Book Series    
DOI: 10.1007/978-3-642-10506-7_9     Document Type: Article

References (65)

1. G.T. Reed, The optical age of silicon. Nature 427, 595-596 (2004) 217
2. T. Pinguet, B. Analui, E. Balmater, D. Guckenberger, M. Harrison, R. Koumans, D. Kucharski, Y. Liang, G. Masini, A. Mekis, S. Mirsaidi, A. Narasimha, M. Peterson, D. Rines, V. Sadagopan, S. Sahni, T.J. Sleboda, D. Song, Y. Wang, B. Welch, J. Witzens, J. Yao, S. Abdalla, S. Gloeckner, P. De Dobbelaere, Monolithically integrated high-speed CMOS photonic transceivers, Proceedings of the 5th International Conference on Group IV Photonics, Sorrento, 17-19, Sept 2008 217, 229, 237
3. Y.A. Vlasov, S.J. McNab, Losses in single-mode silicon-on-insulator strip waveguides and bends. Opt. Express 12, 1622-1631 (2004) 224, 229, 235
4. W. Bogaerts, D. Taillaert, B. Luyssaert, P. Dumon, J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, V. Wiaux, S. Beckx, Basic structures for photonic integrated circuits in Silicon-on-insulator. Opt. Express 12, 1583-1591 (2004) 224, 235
5. S. McNab, N. Moll, Y. Vlasov, Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides. Opt. Express 11, 2927-2939 (2003) 224, 235
6. V.R. Almeida, R. Panepucci, M. Lipson, Nanotaper for compact mode conversion. Opt. Lett. 28(15), 1302-1304 (2003) 224, 227
7. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Efficient silicon-on-insulator fiber coupler fabricated using 248 nm deep UV lithography. Photon. Technol. Lett. 17(12), 2613-2615 (2005) 224, 227
8. P. Rojo Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J.-M. Fedeli, L. Di Cioccio, Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs. Opt. Express 14(9), 3864-3871 (2006) 224
9. F. Grillot, L. Vivien, S. Laval, E. Cassan, Propagation loss in single-mode ultrasmall square silicon-on-insulator optical waveguides. J. Lightwave Technol. 24, 891 (2006) 224
10. S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouck, M. Heitzmann, N. Bouzaida, L. Mollard, Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors. Opt. Lett. 28, 1150-1152 (2003) 224
11. D. Marris, L. Vivien, D. Pascal, M. Rouvière, E. Cassan, A. Lupu, S. Laval, J.-M. Fedeli, L. El Melhaoui, Ultralow loss successive divisions using silicon-on-insulator microwaveg-uides. Appl. Phys. Lett. 87, 211102 (2005) 224, 225
12. L. Vivien, S. Lardenois, D. Pascal, S. Laval, E. Cassan, J.-L. Cercus, A. Koster, J.-M. Fedeli, M. Heitzmann, Experimental demonstration of a low-loss optical H-tree distribution using SOI microwaveguides. Appl. Phys. Lett. 85, 701-703 (2004) 225
13. Results from European Helios project: http://www.helios-project.eu/ 225
14. R. Orobtchouk, N. Schnell, T. Benyattou, J.-M. Fedeli, Compact building block for optical link on SOI technology, Proceeding of 12th European Conference on Integrated Optics ECIO, Grenoble, 221-224, 2005 227
15. D. Taillaert, H. Chong, P. Borel, L. Frandsen, R.M. De La Rue, R. Baets, A compact two-dimensional grating coupler used as a polarization splitter. IEEE Photon. Technol. Lett. 15(9), 1249-1251 (2003) 227, 228
16. L. Vivien, D. Pascal, S. Lardenois, E. Cassan, F. Grillot, S. Laval, J.M. Fedeli, L. El Melhaoui, Light injection in SOI microwaveguides using high-efficiency grating couplers. J. Lightwave Technol. 24, 3810-3813 (2006) 227, 228
17. G. Masanovic, G. Reed, W. Headley, B. Timotijevic, V. Passaro, R. Atta, G. Ensell, A. Evans, A high efficiency input/output coupler for small silicon photonic devices. Opt. Express 13(19), 7374-7379 (2005) 227, 228
18. N. Landru, D. Pascal, A. Koster, Modelling of two-dimensional grating couplers on silicon-on-insulator waveguides using beam propagation method, Opt. Commun. 196, 139-147 (2001) 227, 228
19. R. Orobtchouk, A. Layadi, H. Gualous, D. Pascal, A. Koster, S. Laval, High-efficiency light coupling in a submicrometric silicon-on-insulator waveguide, Appl. Opt. 39, 5773-5777 (2000) 227
20. G. Maire, L. Vivien, G. Sattler, A. Kazmierczak, B. Sanchez, K.B. Gylfason, A. Griol, D. Marris-Morini, E. Cassan, D. Giannone, H. Sohlstrom, D. Hill, High efficiency silicon nitride surface grating couplers, Opt. Express 16(1), 328-333 (2008) 228
21. V.R. Almeida, R. Panepucci, M. Lipson, Nanotaper for compact mode conversion, Opt. Lett. 28(15) 1302-1304 (2003) 229
22. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Efficient silicon-on-insulator fiber coupler fabricated using 248-nm deep UV lithography. IEEE Photon. Technol. Lett. 17(12), 2613-2615 (2005) 229
23. R.S. Jacobsen, K.N. Andersen, P.I. Borel, J. Fage-Pedersen, L.H. Frandsen, O. Hansen, M. Kristensen, A.V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, A. Bjarklev, Strained silicon as a new electro-optical material. Nature 441, 199-202 (2006) 232
24. J. Liu, M. Beals, A. Pomerene, S. Bernardis, R. Sun, J. Cheng, L.C. Kimerling, J. Michel, Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators, Nat. Photonics 2(7), 433-437 (2008) 232
25. Y. Kuo, Y. Kyu Lee, Y. Ge, S. Ren, J.E. Roth, T.I. Kamins, D.A.B. Miller, J.S. Harris, Strong quantum-confined stark effect in germanium quantum well structures on silicon. Nature 437, 1334-1336 (2005) 232
26. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia, A high speed silicon optical modulator based on a metal-oxide-semiconductor capacitor. Nature 427, 615-618 (2004) 232
27. L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. Keil, T. Franck, High speed silicon Mach-Zehnder modulator, Opt. Express 13(8), 3129-3135 (2005) 232
28. S. Manipatruni, X. Qianfan, B. Schmidt, J. Shakya, M. Lipson, High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator, Proceedings of Lasers and Electro-Optics Society IEEE, 537-538, 2007) 232
29. W. Green, W.M. Green, M.J. Rooks, L. Sekaric, Y.A. Vlasov, Ultra compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator. Opt. Express 15(25), 17106-17113 (2007) 232
30. D. Marris-Morini, L. Vivien, J.-M. Fedeli, E. Cassan, P. Lyan, S. Laval, Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure. Opt. Express, 16(1), 334-339 (2008) 232, 233, 234
31. D. Marris-Morini, G. Rasigade, L. Vivien, E. Cassan, S. Laval, P. Rivallin, P. Lyan, J.-M. Fedeli, Recent progresses in fast silicon modulators, Proceedings of the 5th conference on Group IV Photonics, Sorrento, 17-19 Sept 2008 232
32. T. Pinguet, V. Sadagopan, A. Mekis, B. Analui, D. Kucharski, S. Gloeckner, A 1550 nm, 10 Gbps optical modulator with integrated driver in 130 nm CMOS, Proceedings of the 4th conference on Group IV Photonics, Tokyo, 19-21 September 2007 232
33. L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, M. Paniccia, 40 Gbit/s silicon optical modulator for high speed applications. Electron. Lett, 43(22), 1196-1197 (2007) 232
34. D. Marris-Morini, X. Le Roux, L. Vivien, E. Cassan, D. Pascal, M. Halbwax, S. Maine, S. Laval, J.-M. Fedeli, J.-F. Damlencourt, Optical modulation by carrier depletion in a silicon PIN diode. Opt. Express 14, 10838-10843 (2006) 232
35. D. Marris, E. Cassan, L. Vivien, Response time analysis of SiGe/Si modulation-doped multiple-quantum-well structures for optical modulation. J. Appl. Phys. 96, 6109-6112 (2004) 232
36. D. Marris-Morini, X. Le Roux, L. Vivien, E. Cassan, D. Pascal, M. Halbwax, S. Maine, S. Laval, J.-M. Fedeli, J.-F. Damlencourt, High speed all-silicon modulation-doped optical modulator. J. Luminescence, 121, 387-390 (2006) 232, 233, 234
37. G. Roelkens, D. Van Thourhout, R. Baets, R. Nötzel, M. Smit, Laser emission and photode-tection in an InP/InGaAsP layer integrated on and coupled to a SOI waveguide circuit. Opt. Express 14(18), 8154-8159, September (2006) 234
38. J. Bourckaert, G. Roelkens, D. Van Thourhout, R. Baets, Compact InAlAs_InGaAs MSM photodetectors integrated on SOI waveguides. IEEE PTL 19(19), 1484-1486 (2007) 234
39. M. Jutzi, M. Berroth, G. Wöhl, M. Oehme, E. Kasper, Ge-on-Si vertical incidence photodiodes with 39-GHz bandwidth. IEEE Photon. Technol. Lett. 17, 1510-1512 (2005) 234
40. M. Rouvière, L. Vivien, X. Le Roux, J. Mangeney, P. Crozat, C. Hoarau, E. Cassan, D. Pascal, S. Laval, J.-M. Fedeli, J.-F. Damlencourt, J.-M. Hartmann, S. Kolev, Ultra-high speed germanium-on-silicon-on-insulator photodetectors for 1.31 μm and 1.55 μm operation. Appl. Phys. Lett. 87, 231109-231111 (2005) 234
41. O.I. Dosunmu, D.D. Cannon, M.K. Emsley, B. Ghyselen, J. Liu, L.C. Kimerling, M. Selim Ünlü, Resonant cavity enhanced Ge Photodetectors for 1550nm operation on reflecting Si substrates. IEEE J. Sel. Top. Quantum Electron. 10, 694-701 (2004) 234
42. M. Halbwax, M. Rouviere, Y. Zheng, D. Debarre, L.H. Nguyen, J.L. Cercus, C. Clerc, V. Yam, S. Laval, E. Cassan, D. Bouchier, UHV-CVD growth and annealing of thin fully relaxed Ge films on (001) Si. Opt. Mater. 27, 822-826 (2005) 235
43. J.-M. Hartmann, A. Abbadie, A.M. Papon, P. Holliger, G. Rolland, T. Billon, J.-M. Fedeli, M. Rouvière, L. Vivien, S. Laval, Reduced pressure-chemical vapor deposition of Ge thick layers on Si(001) for 1.3-1.55-μm photodetection. J. Appl. Phys. 95, 5905-5907 (2004) 235
44. L. Vivien, M. Rouvière, J.-M. Fedeli, D. Marris-Morini, J.-F. Damlencourt, J. Mangeney, P. Crozat, L. El Melhaoui, E. Cassan, X. Le Roux, D. Pascal, S. Laval, High speed and high responsivity germanium photodetector integrated in a silicon-on-insulator microwaveguide. Opt. Express 15(15), 9843-9848 (2007) 235
45. D. Ahn, C. Yin Hong, J. Liu, W. Giziewicz, M. Beals, L.C. Kimerling, J. Michel, J. Chen, F.X. Kärtner, High performance waveguide integrated Ge photodetectors. Opt. Express 15(7), 3916-3921 (2007) 235
46. T. Yin, R. Cohen, M. Morse, G. Sarid, Y. Chetrit, D. Rubin, M.J. Paniccia, 31GHz Ge n-i-p waveguide photodetectors on silicon-on-insulator substrate. Opt. Express 15(21), 13965-13971 (2007) 235
47. G. Masini, G. Capellini, J. Witzens, C. Gunn, Proceedings of the 4th International Conference on Group IV Photonics, WB2, 28, Tokyo, 19-21 September 2007 235
48. J. Wang, W.Y. Loh, K.T. Chua, H. Zang, Y.Z. Xiong, T.H. Loh, M.B. Yu, S.J. Lee, G.-Q. Lo, D.-L. Kwong, Evanescent coupled Ge p-i-n photodetectors on Si-waveguide with SEG-Ge and comparative study of lateral and vertical p-i-n configurations. IEEE Electron. Dev. Lett. 29, 445-448 (2008) 235
49. L. Vivien, J. Osmond, J.-M. Fedeli, D. Marris-Morini, P. Crozat, J.-F. Damlencourt, E. Cas-san, Y. Lecunff, S. Laval, 42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide. Opt. Express 17, 6252-6257 (2009) 235
50. N. Daldosso, D. Navarro-Urrios, M. Melchiorri, C. Garcia, P. Pellegrino, B. Garrido, C. Sada, G. Battaglin, F. Gourbilleau, R. Rizk, L. Pavesi, Er coupled Si nanocluster waveguide. IEEE J. Sel. Top. Quantum Electron. 12(6), 1607-1617 (2006) 237
51. M.N. Charasse, J.P. Hirtz, III-V on silicon achieving the perfect match. Phys. World, 28-31, January (1990). 237
52. G. Balakrishnan, S.H. Huang, A. Khoshakhlagh, P. Hill, A. Amtout, S. Krishna, G.P. Donati, L.R. Dawson, D.L. Huffaker, Room-temperature optically-pumped InGaSb quantum well lasers monolithically grown on Si(100) Substrate. Electron. Lett. 41(9), 350-352 (2005) 237
53. Z. Mi, P. Bhattacharya, J. Yang, K.P. Pipe, Room-temperature self-organised In0.5Ga0.5 As quantum dot laser on silicon. Electron. Lett. 41(13), 742-744 (2005) 237
54. A.W. Fang, H. Park, O. Cohen, R. Jones, M.J. Paniccia, J.E. Bowers, Electrically pumped hybrid AlGaInAs-silicon evanescent laser. Opt. Express 14(20), 9203-9210 (2006) 237
55. R. Stengl, T. Tan, U. Gösele, A model for the silicon wafer bonding process. Jpn J. Appl. Phys. 28, 1735 (1989) 238
56. U. Gösele, Y. Bluhm, G. Kastner, P. Kopperschmidt, G. Krauter, R. Scholz, A. Schumacher, St. Senz, Q.-Y. Tong, L.-J. Huang, Y.-L. Chao, T.H. Lee, Fundamental issues in wafer bonding, J. Vac. Sci; Technol. A 17(4), 1145-1152 (1999) 238
57. M. Kostrzewa, P. Regreny, M.-P. Besland, J.-L. Leclercq, G. Genet, P. Rojo-Romeo, E. Jalaguier, P. Perreau, H. Moriceau, O. Marty, G. Hollinger, High Quality Epitaxial Growth on New InP/Si Substrate, Conference on Indium Phosphide and Related Materials, 325-328, 12-16 May 2003 238
58. M. Kostrzewa, L.Di Cioccio, J.-M. Fedeli, M. Zussy, P. Regreny, J.-C. Roussin, N. Kern-evez, Die-to-wafer molecular bonding for optical interconnects and packaging. Sens Actuators A: Phys. 125(2), 411-414, (2006) 238
59. S. Guilet, S. Bouchoule, C. Jany, P. Chabert, Optimization of a Cl2 H2 inductively coupled plasma etching process adapted to non thermalized InP wafers for the realization of deep ridge heterostructures, J. Vac. Sci. Technol. B 24(5), 2381-2387 (2006) 240
60. T. Dupont, L. Grenouillet, P. Philippe, M. Perrin, P. Gilet, B. Ben Bakir, J.-M. Fedeli, P. Grosse, L. Di Cioccio, A. Chelnokov, Continuous wave InGaAsP/InP Fabry-Perot lasers on silicon, Proceedings of the 20th International Conference on Indium Phosphide and Related Materials, IPRM 2008, 1-2, 25-29 May 2008. 241
61. J. Van Campenhout, P. Rojo-Romeo, P. Regreny, C. Seassal, D. Van Thourhout, L. Di Cioccio, J.-M. Fedeli, R. Baets, Electrically-injected InGaAsP microdisk lasers heterogeneously integrated on and coupled to a silicon-on-insulator waveguide circuit. Opt. Express 15(11), 6744-6749 (2006) 241
62. P. Rojo-Romeo, J. Van Campenhout, P. Regreny, A. Kazmierczak, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J.-M. Fedeli, L. Di Cioccio, Heterogenous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs. Opt. Express 14(9), 3864-3871 (2006) 242
63. J. Van Campenhout, P. Rojo-Romeo, P. Regreny, C. Seassal, D. Van Thourhout, L. Di Cioccio, J.-M. Fedeli, R. Baets, Electrically-injected InGaAsP microdisk lasers heterogeneously integrated on and coupled to a silicon-on-insulator waveguide circuit. Opt. Express, 15(11) 6744-6749 (2006) 242
64. P.R.A. Binetti, J. Van Campenhout, X.J.M. Leijtens, M. Nikoufard, T. de Vries, Y.S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, X. Letartre, P. Regreny, P. Rojo-Romeo, C. Seassal, P.J. van Veldhoven, R. Notzel, D. Van Thourhout, R. Baets, M.K. Smit, An optical interconnect layer on silicon, Proceedings of the 13th European Conference on Integrated Optics, 2007 242
65. D. Van Thourhout, J. Van Campenhout, P. Rojo-Romeo, P. Regreny, C. Seassal, P. Binetti, X.J.M. Leijtens, R. Nötzel, M.K. Smit, L. Di Cioccio, C. Lagahe, J.-M. Fedeli, R. Baets, PICMOS - a photonic interconnect layer on CMOS, Proceedings of the 33rd European Conference on Optical Communication (ECOC'07), 16-20 Sept (2007). 242