Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography

IEEE Photonics Technology Letters

Volumn 17, Issue 12, 2005, Pages 2613-2615

  Roelkens, Gunther ^a   Dumon, Pieter ^a   Bogaerts, Wim ^a   van Thourhout, Dries ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Integrated optics; Silicon on insulator technology

Indexed keywords

CMOS INTEGRATED CIRCUITS; LITHOGRAPHY; OPTICAL FIBER COUPLING; OPTICAL FIBER FABRICATION; OPTICAL WAVEGUIDES; SILICON ON INSULATOR TECHNOLOGY; ULTRAVIOLET INSTRUMENTS; WAVEGUIDE COUPLERS;

FIBER COUPLER FABRICATED; SILICON-ON-INSULATOR (SOI) WAVEGUIDE; ULTRAVIOLET LITHOGRAPHY;

INTEGRATED OPTICS;

EID: 29244434528     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.859132     Document Type: Article

References (5)

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