Basic structures for photonic integrated circuits in silicon-on-insulator

Optics Express

Volumn 12, Issue 8, 2004, Pages 1583-1591

  Bogaerts, W ^a   Taillaert, D ^a   Luyssaert, B ^a   Dumon, P ^a   Van Campenhout, J ^a   Bienstman, P ^a   Van Thourhout, D ^a   Baets, R ^a   Wiaux, V ^b   Beckx, S ^b  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTALS; DRY ETCHING; LITHOGRAPHY; NANOTECHNOLOGY; OPTICAL FIBER FABRICATION; PHOTONS; SINGLE MODE FIBERS; ULTRAVIOLET RADIATION; WAVEGUIDES;

ELECTRON BEAM LITHOGRAPH; OPTICAL FABRICATION; PHOTONIC CRYSTALS; PHOTONIC INTEGRATED CIRCUITS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 2942733614     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.001583     Document Type: Conference Paper

References (10)

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