High efficiency silicon nitride surface grating couplers

Optics Express

Volumn 16, Issue 1, 2008, Pages 328-333

  Maire, Guillaume ^a   Vivien, Laurent ^a   Sattler, Guillaume ^a   Kaźmierczak, Andrzej ^b   Sanchez, Benito ^c   Gylfason, Kristinn B ^d   Griol, Amadeu ^c   Marris Morini, Delphine ^a   Cassan, Eric ^a   Giannone, Domenico ^b   Sohlström, Hans ^d   Hill, Daniel ^c  

^a UNIV PARIS SUD   (France)

^b Applied Photonics Department   (Belgium)

^c UNIVERSITAT POLITÈCNICA DE VALÈNCIA   (Spain)

^d ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; SILICON NITRIDE; WAVELENGTH;

COUPLING EFFICIENCY; DUTY RATIO; SURFACE GRATING;

WAVEGUIDE COUPLERS;

SILICON DERIVATIVE; SILICON NITRIDE;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; METHODOLOGY; REFRACTOMETRY; THEORETICAL MODEL; TRANSDUCER;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MODELS, THEORETICAL; REFRACTOMETRY; SILICON COMPOUNDS; TRANSDUCERS;

EID: 38049178733     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.000328     Document Type: Article

References (17)

1. D. Marris-Morini, X. Le Roux, L. Vivien, E. Cassan, D. Pascal, M. Halbwax, S. Maine, S. Laval, J. M. Fédéli, and J. F. Damlencourt, "Optical modulation by carrier depletion in a silicon PIN diode," Opt. Express 14, 10838-10843 (2006).
2. A. Kazmierczak, M. Brière, E. Drouard, P. Bontoux, P. Rojo-Romeo, I. O'Connor, X. Letartre, F. Gaffiot, R. Orobtchouk, and T. Benyattou, "Design, simulation, and characterization, of a passive optical add-drop filter in silicon-on-insulator technology," IEEE Photon. Technol. Lett. 17, 1447-1449 (2005).
3. M. Rouvière, L. Vivien, X. Le Roux, J. Mangeney, P. Crozat, C. Hoarau, E. Cassan, D. Pascal, and S. Laval, J.-M. Fédéli, J.-F. Damlencourt, and J. M. Hartmann, and S. Kolev, "Ultrahigh speed germanium-on-silicon-on-insulator photodetectors for 1.31 and 1.55 μm operation," Appl. Phys. Lett. 87, 231109 (2005).
4. A. Morand, Y. Zhang, B. Martin, K. P. Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14, 12814-12821 (2006).
5. F. Prieto, B. Sepulveda, A. Calle, A. Llobera, C. Domunguez, A. Abad, A. Montoya and and L. M. Lechuga, "An integrated optical interferometric nanodevice based on silicon technology for biosensor applications," Nanotechnology 14, 907-912 (2003).
6. P. Debackere, S. Scheerlinck, P. Bienstman, and R. Baets, "Surface plasmon interferometer in silicon-on-insulator: novel concept for an integrated biosensor," Opt. Express 14, 7063-7072 (2006).
7. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, "Silicon-on-Insulator microring resonator for sensitive and label-free biosensing," Opt. Express 15, 7610-7615 (2007).
8. F. P. Payne and J. P. R. Lacey, "A theoretical analysis of scattering loss from planar optical waveguide," IEEE Proc. Optical, and Quantum. Electron. 26, 977-986 (1994).
9. K. K. Lee, D. R. Lim, H. C. Luan, A. Agrawal, J. Foresi, and L. C. Kimerling, "Effect of size and roughness on light transmission, in a Si/SiO2 waveguide: experiments and model," Appl. Phys. Lett. 77, 1617-1619 (2000).
10. F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, "Size Influence on the Propagation Loss Induced by Sidewall Roughness in Ultrasmall SOI Waveguides," IEEE Photon. Technol. Lett. 16, 1661-1663 (2004).
11. N. Daldosso, M. Melchiorri, F. Riboli, M. Guardini, G. Pucker, M. Crivellari, P. Bellutti, A. Lui, and L. Pavesi, "Comparison among various Si3N4 waveguide geometries grown within a CMOS fabrication pilot, line," J. Lightwave Technol. 22, 1734-1740 (2004).
12. S. M. Zheng, H. Chen, and A. W. Poon, "Microring-resonator cross-connect filters in silicon nitride : rib waveguide dimensions dependence," IEEE J. Sel. Top. Quantum Electronics 12, 1380-1387 (2006).
13. L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fédéli, and L. El Melhaoui, "Light injection in SOI microwaveguides using high-efficiency grating couplers," J. Lightwave Technol. 24, 3810-3815 (2006).
14. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. Van Thourhout, P. Bienstman and R. Baets, "Grating couplers for coupling between optical fibers and nanophotonic waveguides," Jpn. J. Appl. Phys. 45, 6071-6077 (2006).
15. K. C. Chang, V. Shah, and T. Tamir, "Scattering and guiding of waves by dielectric gratings with arbitrary profiles," J. Opt. Soc. Am. A 7, 804-812 (1980).
16. N. Landru, D. Pascal, and A. Koster, "Modeling of two-dimensional grating couplers on silicon-on-insulator waveguides using beam propagation method," Opt. Commun. 196, 139-147 (2001).
17. R. M. Emmons and D. G. Hall, "Burried oxide silicon-on-insulator structures II : waveguide grating couplers," IEEE J. Quantum Electron. 28, 164-175 (1992).