A photonic interconnect layer on CMOS

2007 33rd European Conference and Exhibition of Optical Communication, ECOC 2007

Volumn , Issue , 2007, Pages

  Van Thourhout, D ^a   Van Campenhout, J ^a   Rojo Romeo, P ^b   Regreny, P ^b   Seassal, C ^b   Binetti, P ^e   Leijtens, X J M ^e   Notzel R ^e   Smit, M K ^e   Di Cioccio, L ^c   Lagahe, C ^d   Fedeli, J M ^c   Baets, R ^a  

^a GHENT UNIVERSITY   (Belgium)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^c CEA LETI   (France)

^d TRACIT Technologies   (France)

^e EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT INTERCONNECTS; OPTICAL COMMUNICATION; SILICON WAFERS; WAFER BONDING;

INTERCONNECT LAYERS; MICRODETECTORS; MICRODISK LASER; MOLECULAR BONDING; SILICON WAVEGUIDE CIRCUITS; WAFER-SCALE;

SILICON PHOTONICS;

EID: 84931098931     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/ic:20070223     Document Type: Conference Paper

References (3)

1. W. Bogaerts et al, IEEE JSTQE, 8(4), p. 928-934 (2002)
2. L. Di Cioccio, ECS conference 2006, Wafer bonding symposium, Cancun, Mexico
3. J. Van Campenhout et al., OFC 2007, Anaheim This work was supported by the EU through the 1ST project PICMOS