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Volumn 59, Issue 10, 2012, Pages 2689-2698

Amorphous InGaZnO thin-film transistors-Part I: Complete extraction of density of states over the full subband-gap energy range

Author keywords

Amorphous InGaZnO (a IGZO); density of states (DOS); full subband gap; thin film transistors (TFTs)

Indexed keywords

ACTIVE LAYER; AMORPHOUS INGAZNO; AMORPHOUS OXIDE SEMICONDUCTOR (AOS); DC CHARACTERISTICS; DENSITY OF STATE; ENERGY RANGES; FABRICATION PROCESS; GATE OXIDE; GENERATION-RECOMBINATION; HIGH MOBILITY; INTERFACE TRAP DENSITY; MULTI FREQUENCY; OPERATION CONDITIONS; SUBBAND-GAP; SYSTEMATIC DESIGNS; THIN FILM MATERIAL; THIN-FILM TRANSISTOR (TFTS);

EID: 84866737871     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2012.2208969     Document Type: Article
Times cited : (65)

References (29)
  • 6
    • 55849138008 scopus 로고    scopus 로고
    • Modeling of amorphous ingazno thin-film transistors based on the density of states extracted from the optical response of capacitance-voltage characteristics
    • Nov.
    • K. Jeon, C. Kim, I. Song, J. Park, S. Kim, S. Kim, Y. Park, J.-H. Park, S. Lee, D. M. Kim, and D. H. Kim, "Modeling of amorphous InGaZnO thin-film transistors based on the density of states extracted from the optical response of capacitance-voltage characteristics," Appl. Phys. Lett., vol. 93, no. 18, pp. 182 102-1-182 102-3, Nov. 2008.
    • (2008) Appl. Phys. Lett. , vol.93 , Issue.18 , pp. 1821021-1821023
    • Jeon, K.1    Kim, C.2    Song, I.3    Park, J.4    Kim, S.5    Kim, S.6    Park, Y.7    Park, J.-H.8    Lee, S.9    Kim, D.M.10    Kim, D.H.11
  • 7
    • 57049115388 scopus 로고    scopus 로고
    • Extraction of density of states in amorphous gainzno thin-film transistors by combining an optical charge pumping and capacitance-voltage characteristics
    • Dec.
    • J.-H. Park, K. Jeon, S. Lee, S. Kim, S. Kim, I. Song, C. J. Kim, J. Park, Y. Park, D. M. Kim, and D. H. Kim, "Extraction of density of states in amorphous GaInZnO thin-film transistors by combining an optical charge pumping and capacitance-voltage characteristics," IEEE Electron Device Lett., vol. 29, no. 12, pp. 1292-1295, Dec. 2008.
    • (2008) IEEE Electron Device Lett. , vol.29 , Issue.12 , pp. 1292-1295
    • Park, J.-H.1    Jeon, K.2    Lee, S.3    Kim, S.4    Kim, S.5    Song, I.6    Kim, C.J.7    Park, J.8    Park, Y.9    Kim, D.M.10    Kim, D.H.11
  • 8
    • 41649120938 scopus 로고    scopus 로고
    • Modeling of amorphous ingazno4 thin film transistors and their subgap density of states
    • Apr.
    • H.-H. Hsieh, T. Kamiya, K. Nomura, H. Hosono, and C.-C. Wu, "Modeling of amorphous InGaZnO4 thin film transistors and their subgap density of states," Appl. Phys. Lett., vol. 92, no. 13, pp. 133 503-1-133 503-3, Apr. 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.13 , pp. 1335031-1335033
    • Hsieh, H.-H.1    Kamiya, T.2    Nomura, K.3    Hosono, H.4    Wu, C.-C.5
  • 9
    • 67349287542 scopus 로고    scopus 로고
    • Density of states of a-ingazno from temperature-dependent field-effect studies
    • Jun.
    • C. Chen, K. Abe, H. Kumomi, and J. Kanicki, "Density of states of a-InGaZnO from temperature-dependent field-effect studies," IEEE Trans. Electron Devices, vol. 56, no. 6, pp. 1177-1183, Jun. 2009.
    • (2009) IEEE Trans. Electron Devices , vol.56 , Issue.6 , pp. 1177-1183
    • Chen, C.1    Abe, K.2    Kumomi, H.3    Kanicki, J.4
  • 10
    • 77649184578 scopus 로고    scopus 로고
    • Extraction of subgap density of states in amorphous ingazno thin film transistors by using multi-frequency capacitance-voltage characteristics
    • Mar
    • S. Lee, S. Park, S. Kim, Y. W. Jeon, K. Jeon, J.-H. Park, J. Park, I. Song, C. J. Kim, Y. Park, D. M. Kim, and D. H. Kim, "Extraction of subgap density of states in amorphous InGaZnO thin film transistors by using multi-frequency capacitance-voltage characteristics," IEEE Electron Device Lett., vol. 31, no. 3, pp. 231-233, Mar. 2010.
    • (2010) IEEE Electron Device Lett. , vol.31 , Issue.3 , pp. 231-233
    • Lee, S.1    Park, S.2    Kim, S.3    Jeon, Y.W.4    Jeon, K.5    Park, J.-H.6    Park, J.7    Song, I.8    Kim, C.J.9    Park, Y.10    Kim, D.M.11    Kim, D.H.12
  • 11
    • 84862823855 scopus 로고    scopus 로고
    • Differential ideality factor technique for extraction of subgap density of states in amorphous ingazno thinfilm transistors
    • Mar
    • M. Bae, D. Yun, Y. Kim, D. Kong, H. K. Jeong, W. Kim, J. Kim, I. Hur, D. H. Kim, and D. M. Kim, "Differential ideality factor technique for extraction of subgap density of states in amorphous InGaZnO thinfilm transistors," IEEE Electron Device Lett., vol. 33, no. 3, pp. 399-401, Mar. 2012.
    • (2012) IEEE Electron Device Lett. , vol.33 , Issue.3 , pp. 399-401
    • Bae, M.1    Yun, D.2    Kim, Y.3    Kong, D.4    Jeong, H.K.5    Kim, W.6    Kim, J.7    Hur, I.8    Kim, D.H.9    Kim, D.M.10
  • 12
    • 44349136836 scopus 로고    scopus 로고
    • Subgap states in transparent amorphous oxide semiconductor, in-ga-zn-o, observed by bulk sensitive x-ray photoelectron spectroscopy
    • May
    • K. Nomura, T. Kamiya, H. Yanagi, E. Ikenaga, K. Yang, K. Kobayashi, M. Hirano, and H. Hosono, "Subgap states in transparent amorphous oxide semiconductor, In-Ga-Zn-O, observed by bulk sensitive X-ray photoelectron spectroscopy," Appl. Phys. Lett., vol. 92, no. 20, pp. 202 117-1-202 117-3, May 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.20 , pp. 2021171-2021173
    • Nomura, K.1    Kamiya, T.2    Yanagi, H.3    Ikenaga, E.4    Yang, K.5    Kobayashi, K.6    Hirano, M.7    Hosono, H.8
  • 13
    • 77958549292 scopus 로고    scopus 로고
    • Numerical analysis on temperature dependence of characteristics of amorphous in-ga-zn-oxide tft
    • Jun.
    • H. Godo, D. Kawae, S. Yoshitomi, T. Sasaki, S. Ito, H. Ohara, A. Miyanaga, and S. Yamazaki, "Numerical analysis on temperature dependence of characteristics of amorphous In-Ga-Zn-oxide TFT," SID Dig. Tech. Papers, vol. 40, no. 1, pp. 1110-1112, Jun. 2009.
    • (2009) SID Dig. Tech. Papers , vol.40 , Issue.1 , pp. 1110-1112
    • Godo, H.1    Kawae, D.2    Yoshitomi, S.3    Sasaki, T.4    Ito, S.5    Ohara, H.6    Miyanaga, A.7    Yamazaki, S.8
  • 14
    • 70350726087 scopus 로고    scopus 로고
    • Two-dimensional numerical simulation of radio frequency sputter amorphous in-ga-zn-o thin-film transistors
    • Oct.
    • T.-C. Fung, C.-S. Chuang, C. Chen, K. Abe, R. Cottle, M. Townsend, H. Kumomi, and J. Kanicki, "Two-dimensional numerical simulation of radio frequency sputter amorphous In-Ga-Zn-O thin-film transistors," J. Appl. Phys., vol. 106, no. 8, pp. 084511-1-084511-10, Oct. 2009.
    • (2009) J. Appl. Phys. , vol.106 , Issue.8 , pp. 0845111-08451110
    • Fung, T.-C.1    Chuang, C.-S.2    Chen, C.3    Abe, K.4    Cottle, R.5    Townsend, M.6    Kumomi, H.7    Kanicki, J.8
  • 15
    • 80052029762 scopus 로고    scopus 로고
    • Extraction of subgap donor states in a-igzo tfts by generation- recombination current spectroscopy
    • Sep.
    • M. Bae, Y. Kim, S. Kim, D. M. Kim, and D. H. Kim, "Extraction of subgap donor states in a-IGZO TFTs by generation-recombination current spectroscopy," IEEE Electron Device Lett., vol. 32, no. 9, pp. 1248-1250, Sep. 2011.
    • (2011) IEEE Electron Device Lett. , vol.32 , Issue.9 , pp. 1248-1250
    • Bae, M.1    Kim, Y.2    Kim, S.3    Kim, D.M.4    Kim, D.H.5
  • 16
    • 77958158218 scopus 로고    scopus 로고
    • Interface and bulk effects for bias-light-illumination instability in amorphous-in-ga-zn-o thin-film transistors
    • Oct.
    • K. Nomura, T. Kamiya, and H. Hosono, "Interface and bulk effects for bias-light-illumination instability in amorphous-In-Ga-Zn-O thin-film transistors," J. Soc. Inf. Display, vol. 18, no. 10, pp. 789-795, Oct. 2010.
    • (2010) J. Soc. Inf. Display , vol.18 , Issue.10 , pp. 789-795
    • Nomura, K.1    Kamiya, T.2    Hosono, H.3
  • 18
    • 0242336081 scopus 로고    scopus 로고
    • C. R. Kagan and P. Andry, Eds. New York: Marcel Dekker
    • J. Kanicki and S. Martin, Thin-Film Transistors, C. R. Kagan and P. Andry, Eds. New York: Marcel Dekker, 2003, pp. 71-137.
    • (2003) Thin-Film Transistors , pp. 71-137
    • Kanicki, J.1    Martin, S.2
  • 20
    • 42649091110 scopus 로고    scopus 로고
    • Physics of amorphous conducting oxides
    • May
    • J. Robertson, "Physics of amorphous conducting oxides," J. Non-Cryst. Solids, vol. 354, no. 19-25, pp. 2791-2795, May 2008.
    • (2008) J. Non-Cryst. Solids , vol.354 , Issue.19-25 , pp. 2791-2795
    • Robertson, J.1
  • 21
    • 56249132738 scopus 로고    scopus 로고
    • Electronic structure of oxygen deficient amorphous oxide semiconductor a-ingazno4-x: Optical analyses and first-principle calculations
    • Jun.
    • T. Kamiya, K. Nomura, M. Hirano, and H. Hosono, "Electronic structure of oxygen deficient amorphous oxide semiconductor a-InGaZnO4-x: Optical analyses and first-principle calculations," Phys. Stat. Sol. (C), vol. 5, no. 9, pp. 3098-3100, Jun. 2008.
    • (2008) Phys. Stat. Sol. (C) , vol.5 , Issue.9 , pp. 3098-3100
    • Kamiya, T.1    Nomura, K.2    Hirano, M.3    Hosono, H.4
  • 22
    • 65649106511 scopus 로고    scopus 로고
    • Electronic structure of the amorphous oxide semiconductor a-ingazno4-x:tauc-lorentz optical model and origins of subgap states
    • Apr.
    • T. Kamiya, K. Nomura, and M. Hirano, "Electronic structure of the amorphous oxide semiconductor a-InGaZnO4-x:Tauc-Lorentz optical model and origins of subgap states," Phys. Stat. Sol. (A), vol. 206, no. 5, pp. 860-867, Apr. 2009.
    • (2009) Phys. Stat. Sol. (A) , vol.206 , Issue.5 , pp. 860-867
    • Kamiya, T.1    Nomura, K.2    Hirano, M.3
  • 23
    • 80052539678 scopus 로고    scopus 로고
    • Effects of excess oxygen on operation characteristics of amorphous in-ga-zn-o thin-film transistors
    • Sep.
    • K. Ide, Y. Kikuchi, K. Nomura, M. Kimura, T. Kamiya, and H. Hosono, "Effects of excess oxygen on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors," Appl. Phys. Lett., vol. 99, no. 9, pp. 093507-1-093507-3, Sep. 2011.
    • (2011) Appl. Phys. Lett. , vol.99 , Issue.9 , pp. 0935071-0935073
    • Ide, K.1    Kikuchi, Y.2    Nomura, K.3    Kimura, M.4    Kamiya, T.5    Hosono, H.6
  • 24
    • 78149382528 scopus 로고    scopus 로고
    • Present status of amorphous in-ga-zn-o thin-film transistors
    • Aug.
    • T. Kamiya, K. Nomura, and H. Hosono, "Present status of amorphous In-Ga-Zn-O thin-film transistors," Sci. Technol. Adv. Mater., vol. 11, no. 4, pp. 044305-1-044305-23, Aug. 2010.
    • (2010) Sci. Technol. Adv. Mater. , vol.11 , Issue.4 , pp. 0443051-04430523
    • Kamiya, T.1    Nomura, K.2    Hosono, H.3
  • 25
    • 77649122278 scopus 로고    scopus 로고
    • Origins of high mobility and low operation voltage of amorphous oxide tfts: Electronic structure, electron transport, defects and doping
    • Jul.
    • T. Kamiya, K. Nomura, and H. Hosono, "Origins of high mobility and low operation voltage of amorphous oxide TFTs: Electronic structure, electron transport, defects and doping," J. Display Technol., vol. 5, no. 7, pp. 273-288, Jul. 2009.
    • (2009) J. Display Technol. , vol.5 , Issue.7 , pp. 273-288
    • Kamiya, T.1    Nomura, K.2    Hosono, H.3
  • 26
    • 55449137021 scopus 로고    scopus 로고
    • Disorder and instability process in amorphous conducting oxides
    • Jun.
    • J. Robertson, "Disorder and instability process in amorphous conducting oxides," Phys. Stat. Sol. (B), vol. 245, no. 6, pp. 1026-1032, Jun. 2008.
    • (2008) Phys. Stat. Sol. (B) , vol.245 , Issue.6 , pp. 1026-1032
    • Robertson, J.1
  • 28
    • 21844451632 scopus 로고    scopus 로고
    • Carrier transport and electronic structure in amorphous oxide semiconductor, a-ingazno4
    • Aug.
    • A. Takagi, K. Nomura, H. Ohta, H. Yanagi, T. Kamiya, M. Hirano, and H. Hosono, "Carrier transport and electronic structure in amorphous oxide semiconductor, a-InGaZnO4," Thin Solid Films, vol. 486, no. 1/2, pp. 38-41, Aug. 2005.
    • (2005) Thin Solid Films , vol.486 , Issue.1-2 , pp. 38-41
    • Takagi, A.1    Nomura, K.2    Ohta, H.3    Yanagi, H.4    Kamiya, T.5    Hirano, M.6    Hosono, H.7
  • 29
    • 84866728478 scopus 로고    scopus 로고
    • Amorphous ingazno thin-film transistors-part ii: Modeling and simulation of negative bias illumination stress-induced instability
    • Oct.
    • Y. Kim, S. Kim, W. Kim, M. Bae, H. K. Jung, D. Kong, S. Choi, D. M. Kim, and D. H. Kim, "Amorphous InGaZnO thin-film transistors-Part II: Modeling and simulation of negative bias illumination stress-induced instability," IEEE Trans. Electron Devices, vol. 59, no. 10, pp. 2699-2706, Oct. 2012.
    • (2012) IEEE Trans. Electron Devices , vol.59 , Issue.10 , pp. 2699-2706
    • Kim, Y.1    Kim, S.2    Kim, W.3    Bae, M.4    Jung, H.K.5    Kong, D.6    Choi, S.7    Kim, D.M.8    Kim, D.H.9


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.