Preliminary evaluation of an SF5+ polyatomic primary ion beam for analysis of organic thin films by secondary ion mass spectrometry

Rapid Communications in Mass Spectrometry

Volumn 12, Issue 19, 1998, Pages 1303-1312

  Gillen, Greg ^a   Roberson, Sonya ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMOLECULES; IMAGE ENHANCEMENT; ION SOURCES; IONS; POLYMER FILMS; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; THIN FILMS;

AR+ BOMBARDMENT; BIOLOGICAL TISSUES; MAGNETIC SECTORS; MOLECULAR IONS; ORGANIC THIN-FILMS; ORGANIC VAPORS; POLYATOMIC PRIMARY IONS; PRIMARY IONS; SECONDARY ION-MASS SPECTROMETRY; THIN-FILMS;

ION BEAMS;

FLUORIDE; SULFUR DERIVATIVE; SULFUR PENTAFLUORIDE CATION;

ARTICLE; ARTIFICIAL MEMBRANE; INSTRUMENTATION; MASS SPECTROMETRY;

FLUORIDES; MEMBRANES, ARTIFICIAL; SPECTROMETRY, MASS, SECONDARY ION; SULFUR COMPOUNDS;

EID: 0031595216     PISSN: 09514198     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0231(19981015)12:19<1303::AID-RCM330>3.0.CO;2-7     Document Type: Article

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