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Volumn 43, Issue 11, 2011, Pages 1430-1435

Depth resolution and inhomogeneity of the sputtering dose with sample rotation and ion beam rastering

Author keywords

AES; depth profiling; rotation; roughening; SIMS; XPS

Indexed keywords

AES; BEAM RASTERING; BEAM SIZE; DEPTH RESOLUTION; INHOMOGENEITIES; ION DOSE; LINE SPACING; MEASURED DEPTHS; PRACTICAL ISSUES; RATIONAL NUMBERS; RELATIVE STANDARD DEVIATIONS; ROTATION FREQUENCIES; ROTATIONAL FREQUENCY; ROUGHENING; SAMPLE ROTATION; SPATIAL VARIATIONS; SPUTTER-DEPTH PROFILING;

EID: 80053953468     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3735     Document Type: Article
Times cited : (6)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.