VAMAS interlaboratory study on organic depth profiling. Part I: Preliminary report

Surface and Interface Analysis

Volumn 43, Issue 1-2, 2011, Pages 510-513

  Shard, A G ^a   Foster, R ^a   Gilmore, I S ^a   Lee, J L S ^a   Ray, S ^a   Yang, L ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

cluster ions; depth profiling; secondary ion mass spectroscopy; SIMS; X ray photoelectron spectroscopy; XPS

Indexed keywords

CLUSTER IONS; COEFFICIENTS OF VARIATIONS; DEPTH RESOLUTION; GRAZING INCIDENCE ANGLE; INTERLABORATORY STUDIES; ION CURRENTS; ORGANIC DEPTH PROFILING; ORGANIC SYSTEMS; SAMPLE ROTATION; SECONDARY ION MASS SPECTROSCOPY; SECONDARY IONS; SIMS; SPUTTERING YIELDS; XPS;

IONS; MASS SPECTROMETERS; PHOTOELECTRICITY; PHOTONS; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILING;

EID: 78951492747     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3268     Document Type: Conference Paper

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