Laser wavelength and spot diameter dependence of extreme ultraviolet conversion efficiency in ω, 2ω, and 3ω Nd:YAG laser-produced plasmas

Applied Physics Letters

Volumn 86, Issue 26, 2005, Pages 1-3

  Miyamoto, Shuji ^a   Shimoura, Atushi ^a   Amano, Sho ^a   Fukugaki, Keisuke ^a   Kinugasa, Hiroaki ^a   Inoue, Takahiro ^a   Mochizuki, Takayasu ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; CRYOGENICS; LENSES; LIGHT EMISSION; MULTILAYERS; NEODYMIUM LASERS; PHOTODETECTORS; SPECTROMETERS; ULTRAVIOLET RADIATION;

CONVERSION EFFICIENCY; EXTREME ULTRAVIOLET (EUV) EMISSION; LASER ENERGIES; LASER WAVELENGTH;

LASER PRODUCED PLASMAS;

EID: 22144478296     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1968415     Document Type: Article

References (12)

1. For example, Proc. SPIE 0277-786X 5374 (2004); T. Mochizuki, Proc. SPIE 3886, 306 (1999).
2. For example, Proc. SPIE 0277-786X 5374 (2004); T. Mochizuki, Proc. SPIE 3886, 306 (1999).
3. A. Sasaki, K. Nishihara, A. Sunahara, K. Gamada, T. Nishikawa, K. Fujima, T. Kawamura, F. Koike, T. Kagawa, R. More, and T. Kato, 3rd Int'l Extreme Ultra-Violet Lithography (EUVL) Symposium, Miyazaki, Japan, 2-4 November 2004; H. Tanuma, H. Ohashi, E. Shibuya, N. Kobayashi, T. Okuno, S. Fujioka, H. Nishimura, and K. Nishihara, ibid.
4. A. Sasaki, K. Nishihara, A. Sunahara, K. Gamada, T. Nishikawa, K. Fujima, T. Kawamura, F. Koike, T. Kagawa, R. More, and T. Kato, 3rd Int'l Extreme Ultra-Violet Lithography (EUVL) Symposium, Miyazaki, Japan, 2-4 November 2004; H. Tanuma, H. Ohashi, E. Shibuya, N. Kobayashi, T. Okuno, S. Fujioka, H. Nishimura, and K. Nishihara, ibid.
5. A. Shimoura, S. Amano, S. Miyamoto, and T. Mochizuki, Appl. Phys. Lett. 72, 164 (1998).
6. R. Kodama, T. Mochizuki, K. A. Tanaka, and C. Yamanaka, Appl. Phys. Lett. 50, 720 (1987).
7. U. Stamm, I. Ahmad, I. Balogh, H. Birner, D. Bolshukhin, J. Brudermann, S. Enke, F. Flohrer, K. Gäbel, S. Götze, G. Hergenhan, J. Kleinschmidt, D. Klöpfel, P. Köhler, V. Korobochko, B. Mader, R. Müller, J. Ringling, G. Schriever, C. D. Tran, and C. Ziener, Science 5037, 119 (2003).
8. T. Mochizuki, A. Simoura, S. Amano, and S. Miyamoto, Proc. SPIE 4504, 87 (2001).
9. A. Shimoura, T. Mochizuki, S. Miyamoto, S. Amano, and T. Uyama, Appl. Phys. Lett. 75, 2026 (1999).
10. D. Colombant and G. F. Tonon, J. Appl. Phys. 44, 3524 (1973).
11. C. Yamanaka, in Laser Science and Technology, An International Handbook (Harwood Academic, Chur, Switzerland, 1991), Vol. 10, p. 29.
12. M. Nakai, H. Azechi, N. Miyanaga, K. Shigemori, T. Kawasaki, Y. Nagaya, M. Nishikino, Y. Kanai, D. Ohnuki, H. Nishimura, H. Shiraga, O. Maegawa, R. Ishizaki, K. Nishihara, H. Takabe, and T. Yamanaka, Phys. Plasmas 9, 1734 (2002).