Experimental scaling law for mass ablation rate from a Sn plasma generated by a 1064 nm laser

Journal of Applied Physics

Volumn 106, Issue 3, 2009, Pages

  Burdt, Russell A ^a,b   Yuspeh, Sam ^a,b   Sequoia, Kevin L ^a   Tao, Yezheng ^a   Tillack, Mark S ^a   Najmabadi, Farrokh ^a,b  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

1064 NM LASERS; ABLATION DEPTH; ANALYTICAL MODEL; ATOMIC NUMBERS; EMPIRICAL FORMULAS; EXPANDING PLASMAS; LASER INTENSITIES; MASS ABLATION; PARAMETER SPACES; PARTICLE DIAGNOSTICS; SI IONS; SI WAFER; THIN LAYERS;

ATOMS; LASER ABLATION; LASERS; PLASMA DIAGNOSTICS; PLASMAS; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TARGETS;

TIN;

EID: 69149085169     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3190537     Document Type: Article

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