Quantitative dopant contrast in the helium ion microscope

EPL

Volumn 86, Issue 2, 2009, Pages

  Jepson, M A E ^a   Inkson, B J ^a   Liu, Xiong ^b   Scipioni, L ^c   Rodenburg, C ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b CARL ZEISS SMT AG   (Germany)

^c Carl Zeiss Vision Inc USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 79051471481     PISSN: 02955075     EISSN: 12864854     Source Type: Journal    
DOI: 10.1209/0295-5075/86/26005     Document Type: Article

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