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Volumn 8, Issue 8, 2008, Pages 2188-2193

Ion beam doping of silicon nanowires

Author keywords

[No Author keywords available]

Indexed keywords

B IMPLANTATIONS; CRYSTALLINE STRUCTURES; ELECTRICAL TRANSPORTS; FLUENCES; P TYPES; PHONON CONFINEMENTS; RAMAN MEASUREMENTS; SI NANOWIRES; SILICON NANOWIRES; STRUCTURAL DISORDERS; THERMAL-ANNEALING;

EID: 56849128027     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl080610d     Document Type: Article
Times cited : (87)

References (44)
  • 8
    • 7244259068 scopus 로고
    • Ziegler, J. F, Ed, North-Holland: Amsterdam
    • Handbook of ion implantation; Ziegler, J. F., Ed.; North-Holland: Amsterdam, 1992.
    • (1992) Handbook of ion implantation
  • 11
    • 0016603306 scopus 로고    scopus 로고
    • Picfnar, K. A. Ion Implantation in Silicon-Physics, Processing and Microelectronic Devices. In Applied Solid State Science; Wolfe, R., Ed.; Academic: New York, 1975; 5.
    • Picfnar, K. A. Ion Implantation in Silicon-Physics, Processing and Microelectronic Devices. In Applied Solid State Science; Wolfe, R., Ed.; Academic: New York, 1975; Vol. 5.
  • 16
    • 84868903642 scopus 로고    scopus 로고
    • 2, we measured an etch rate of ~100nm/min. An etching time of 8 s is thus long enough to strip off a 13 nm thick oxide shell. Accordingly, increasing the etch time did not result in any improvement in the quality of the contacts.
    • 2, we measured an etch rate of ~100nm/min. An etching time of 8 s is thus long enough to strip off a 13 nm thick oxide shell. Accordingly, increasing the etch time did not result in any improvement in the quality of the contacts.
  • 19
    • 61449214798 scopus 로고    scopus 로고
    • Ions impinging close to the NW edge would travel through a thinner portion of material
    • Note that simulations in Figure 2 consider a trajectory thorough the NW centre
    • Note that simulations in Figure 2 consider a trajectory thorough the NW centre. Ions impinging close to the NW edge would travel through a thinner portion of material. The slight left-shift for the peaks in Figure 2 qualitatively compensates for this effect.
    • The slight left-shift for the peaks in Figure 2 qualitatively compensates for this effect


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.