FIB damage of Cu and possible consequences for miniaturized mechanical tests

Materials Science and Engineering: A

Volumn 459, Issue 1-2, 2007, Pages 262-272

  Kiener, D ^a,b   Motz, C ^b   Rester, M ^b   Jenko, M ^c   Dehm, G ^b,d  

^a MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^b Erich Schmid Institute of Materials Science   (Austria)

^c INSTITUTE OF METALS AND TECHNOLOGY   (Slovenia)

^d UNIVERSITY OF LEOBEN   (Austria)

Author keywords

Auger electron spectroscopy (AES); Focussed ion beam (FIB); Ion damage; Mechanical properties; Transmission electron microscopy (TEM)

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; FOCUSED ION BEAMS; GALLIUM; ION BOMBARDMENT; ION IMPLANTATION; MECHANICAL PROPERTIES; MECHANICAL TESTING; MONTE CARLO METHODS; TRANSMISSION ELECTRON MICROSCOPY;

ION DAMAGE; ION DOSE; ION ENERGY; MINIATURIZED MECHANICAL TESTS;

COPPER;

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; COPPER; FOCUSED ION BEAMS; GALLIUM; ION BOMBARDMENT; ION IMPLANTATION; MECHANICAL PROPERTIES; MECHANICAL TESTING; MONTE CARLO METHODS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 34247276111     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2007.01.046     Document Type: Article

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