Design, fabrication and Helium Ion Microscope patterning of suspended nanomechanical graphene structures for NEMS applications

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2578-2581

  Annamalai, M ^a   Mathew, S ^a   Viswanathan, V ^a   Fang, C ^a   Pickard, D S ^a   Palaniapan, M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Graphene; Helium Ion Microscope; nanomechanical structure

Indexed keywords

AFM; ATOMIC LAYER; FABRICATED STRUCTURES; FEATURE SIZES; HELIUM ION; MASS SENSING; NANOMECHANICAL DEVICE; NANOMECHANICAL STRUCTURE; OPERATING FREQUENCY; SILICON-BASED STRUCTURES; SMALL SIZE; THREE ORDERS OF MAGNITUDE;

ACTUATORS; ATOMIC FORCE MICROSCOPY; FABRICATION; GRAPHENE; HELIUM; ION MICROSCOPES; IONS; MICROSYSTEMS; SOLID STATE DEVICES; SOLID-STATE SENSORS;

CRYSTAL ATOMIC STRUCTURE;

EID: 80052122013     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969824     Document Type: Conference Paper

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