Effects of substrate bias on structure and mechanical properties of (TiVCrZrHf)N coatings

Surface and Coatings Technology

Volumn 207, Issue , 2012, Pages 293-299

  Tsai, Du Cheng ^a   Liang, Shih Chang ^a   Chang, Zue Chin ^b   Lin, Tai Nan ^c   Shiao, Ming Hua ^d   Shieu, Fuh Sheng ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

^d INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

Author keywords

Coating materials; Microstructure; Thin films

Indexed keywords

CHEMICAL COMPOSITIONS; COATING MATERIAL; COLUMNAR STRUCTURES; DIFFERENT SUBSTRATES; FACE-CENTERED CUBIC; FACETED SURFACES; GRAIN SIZE; HIGHLY DENSE; NANO GRAINS; PREFERRED ORIENTATIONS; RADIO FREQUENCY MAGNETRON SPUTTERING; SMOOTH SURFACE; STRENGTHENING MECHANISMS; STRUCTURAL EVOLUTION; SUBSTRATE BIAS;

MECHANICAL PROPERTIES; MICROSTRUCTURE; SURFACE ROUGHNESS; THIN FILMS;

COATINGS;

EID: 84865802866     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.07.004     Document Type: Article

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