Design, fabrication and testing of a serial kinematic MEMS XY stage for multifinger manipulation

Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

  Kim, Yong Sik ^a,b   Yoo, Jae Myung ^a   Yang, Seung Ho ^a   Choi, Young Man ^a,c   Dagalakis, Nicholas G ^a   Gupta, Satyandra K ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c Korea Institute for Machinery and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION DISPLACEMENT; COUPLED MOTIONS; DEEP REACTIVE ION ETCHING; KINEMATIC MECHANISM; MEMS STAGE; MULTI-FINGER MANIPULATION; NESTED STRUCTURES; RANGE OF MOTIONS; SILICON ON INSULATOR WAFERS; SINGLE DEGREE OF FREEDOMS; XY STAGE;

KINEMATICS; MEMS; POLYPROPYLENES; SILICON WAFERS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 84865130273     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/8/085029     Document Type: Article

References (24)

1. Yao Q, Dong J and Ferreira P M 2007 Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage Int. J. Mach. Tools Manuf. 47 946-61 (Pubitemid 46210128)
2. Sahu B, Taylor C R and Leang K K 2010 Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation J. Manuf. Sci. Eng. 132 030917
3. Kim C H and Kim Y K 1999 Integration of a micro lens on a micro XY-stage Proc. SPIE 3892 109-17
4. Laszczyka K, Bargiela S, Goreckia C, Kreelb J, Dziubana P, Kujawiskab M, Calletc D and Frankd S 2010 A two directional electrostatic comb-drive X-Y micro-stage for MOEMS applications Sensors Actuators A 163 255-65
5. Indermuhle P F, Jaecklin V P, Brugger J, Linder C, de Rooij N F and Binggeli M 1995 AFM imaging with an xy-micropositioner with integrated tip Sensors Actuators A 47 562-5
6. Sun L, Wang J, Rong W, Li X and Bao H 2008 A silicon integrated micro nano-positioning XY-stage for nano-manipulation J. Micromech. Microeng. 18 125004
7. Gorman J J, Kim Y S, Vladar A E and Dagalakis N G 2007 Design of an on-chip microscale nanoassembly system Int. J. Nanomanuf. 1 710-21 (Pubitemid 351638787)
8. Duc T C, Lau G K and Sarro P M 2008 Polymeric thermal microactuator with embedded silicon skeleton: part II-fabrication, characterization, and application J. MEMS 17 823-31
9. Mukhopadhyay D, Dong J, Pengwang E and Ferreira P 2008 A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage Sensors Actuators A 147 340-51
10. Dong J and Ferreira P M 2009 Electrostatically actuated cantilever with SOI-MEMS parallel kinematic XY stage J. MEMS 18 641-51
11. Gao P, Swei S-M and Yuan Z 1999 A new peizo-driven precision micropositioning stage utilizing flexure hinges Nanotechnology 10 394-8 (Pubitemid 30523093)
12. Wright J A, Tai Y C and Chang S C 1997 A large-force, fully-integrated MEMS magnetic actuator Solid State Sensors and Actuators Int. Conf. 16-19 pp 793-6
13. Bergna S, Gorman J J and Dagalakis N G 2005 Design and modeling of thermally actuated MEMS nanpositioner IMECE2005: Proc. ASME Int. Mechanical Engineering Congress and Exposition (Orlando, FL, USA,)
14. Paros J M and Weisbord L 1965 How to design flexure hinges Mach. Des. 37 151-6
15. Yang S H, Kim Y S, Purushotham K P, Yoo J M, Choi Y M and Dagalakis N G 2010 AFM characterization of nanopositioner in-plane stiffnesses Sensors Actuators A 163 383-7
16. Howatson A M, Lund P G and Todd J D 1991 Engineering Tables and Data 2nd edn p 41
17. Miller K, Cowen A, Hames G and Hardy B SOIMUMPs Design Handbook revision 4.0 http://www.memscap.com/mumps/documents/SOIMUMPs.dr.v4.pdf
18. Zhu Y, Corigliano A and Espinosa H D 2006 A thermal actuator for nanoscale in situ microscopy testing: design and characterization J. Micromech. Microeng. 16 242-53 (Pubitemid 43146229)
19. Baker M S, Plass R A, Headley T J and Walraven J A 2004 Final report: compliant thermomechancial MEMS actuators LDRD www.mems.sandia.gov/tech-info/ doc/thermal-actuator-SAND.pdf
20. Luo J L, Flewitt A J, Spearing S M, Fleck N A and Milne W L 2005 Three types of planar structure microspring electro-thermal actuators with insulating beam constraints J. Micromech. Microeng. 15 1527-35 (Pubitemid 41009751)
21. Jones R M 2008 Buckling of Bars, Plates, and Shells pp 73-5
22. DMEMS Dynamic MEMS Measurement Option for Wyko NT1100 Optical Profilers http://www2.veeco.com/pdfs.php/396
23. PI Piezo Nano Positioning 2009 2-62-2-63 www.physikinstrumente.com/en/ products/prdetail. php?sortnr=201250
24. Gorman J J, Kim Y S and Dagalakis N G 2006 Control of MEMS nanopositioners with nano-scale resolution ASME Proc. of the ASME Int. Mechanical Engineering Conf. and Exhibition (Chicago, USA,)