A two directional electrostatic comb-drive X-Y micro-stage for MOEMS applications

Sensors and Actuators, A: Physical

Volumn 163, Issue 1, 2010, Pages 255-265

  Laszczyk, Karolina ^a   Bargiel, Sylwester ^a   Gorecki, Christophe ^a   Krel, Jerzy ^b   Dziuban, Piotr ^a   Kujawińska, Małgorzata ^b   Callet, Damien ^c   Frank, Sven ^d  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c Quai 33 33   (France)

^d POLYTEC GMBH   (Germany)

Author keywords

Comb drive actuator; DRIE; Microlens scanner; MOEMS; SOI; X Y micro stage

Indexed keywords

COMB-DRIVE ACTUATOR; DRIE; MICROLENS SCANNER; SOI; X-Y MICRO-STAGE;

ACTUATORS; ELECTROSTATICS; MICROLENSES; NATURAL FREQUENCIES; OPTICAL COMMUNICATION; SCANNING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

ELECTROSTATIC ACTUATORS;

EID: 77957676899     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.06.020     Document Type: Article

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