Design of an on-chip microscale nanoassembly system

International Journal of Nanomanufacturing

Volumn 1, Issue 6, 2007, Pages 710-721

  Gorman, Jason J ^a   Kim, Yong Sik ^a   Vladár, András E ^a   Dagalakis, Nicholas G ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

MEMS; Microelectromechanical systems; Nanoassembly; Nanomanipulator; Probe based nanomanipulation

Indexed keywords

CALIBRATION; MANIPULATORS; MEMS; MOTION CONTROL; NANOSTRUCTURES; NANOTECHNOLOGY;

NANOASSEMBLY; NANOMANIPULATION; NANOMANIPULATOR;

ASSEMBLY;

EID: 77953781642     PISSN: 17469392     EISSN: 17469406     Source Type: Journal    
DOI: 10.1504/IJNM.2007.017990     Document Type: Article

References (12)